Shao-Wen Hsia

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Mission Viejo, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for high-resolution in-situ plasma etching of...
- Patent number 6,798,065
- Issue date Sep 28, 2004
- Newport Fab, LLC
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and process
- Patent number 6,383,821
- Issue date May 7, 2002
- Conexant Systems, Inc.
- David T. Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for high-resolution in-situ plasma etching of inorganic a...
- Patent number 6,328,848
- Issue date Dec 11, 2001
- Conexant Systems, Inc.
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for high-resolution in-situ plasma etching of...
- Patent number 6,291,361
- Issue date Sep 18, 2001
- Conexant Systems, Inc.
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for stripping photoresist and polymer layers...
- Patent number 6,251,568
- Issue date Jun 26, 2001
- Conexant Systems Inc.
- Shao-Wen Hsia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for high-resolution in-situ plasma etching of...
- Publication number 20020016071
- Publication date Feb 7, 2002
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS