Shawn D. Eggum

Person

Chaska, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reticle pod with window
- Patent number 12,140,860
- Issue date Nov 12, 2024
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod having side containment of reticle
- Patent number 12,062,560
- Issue date Aug 13, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for holding and transporting reticles having a transparen...
- Patent number 11,914,287
- Issue date Feb 27, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod having side containment of reticle
- Patent number 11,594,437
- Issue date Feb 28, 2023
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purge connectors and modules for a substrate container
- Patent number 11,551,957
- Issue date Jan 10, 2023
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite substrate carrier
- Patent number 8,734,698
- Issue date May 27, 2014
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Wafer carrier door and spring biased latching mechanism
- Patent number 7,168,587
- Issue date Jan 30, 2007
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite substrate carrier
- Patent number 7,168,564
- Issue date Jan 30, 2007
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Wafer support attachment for a semi-conductor wafer transport conta...
- Patent number 7,131,176
- Issue date Nov 7, 2006
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connector assembly for fluid transfer
- Patent number 7,115,335
- Issue date Oct 3, 2006
- Entegris, Inc.
- Shawn D. Eggum
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Wafer carrier door and latching mechanism with c-shaped cam follower
- Patent number 6,955,382
- Issue date Oct 18, 2005
- Entegris, Inc.
- Shawn D. Eggum
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Grant
Wafer carrier with wafer retaining system
- Patent number 6,951,284
- Issue date Oct 4, 2005
- Entegris, Inc.
- Shawn Cheesman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier door and spring biased latching mechanism
- Patent number 6,880,718
- Issue date Apr 19, 2005
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite substrate carrier
- Patent number 6,871,741
- Issue date Mar 29, 2005
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Wafer enclosure sealing arrangement for wafer containers
- Patent number 6,848,578
- Issue date Feb 1, 2005
- Entegris, Inc.
- Shawn D. Eggum
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Wafer support attachment for a semi-conductor wafer transport conta...
- Patent number 6,811,029
- Issue date Nov 2, 2004
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for fabricating composite substrate carrier
- Patent number 6,808,668
- Issue date Oct 26, 2004
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Wafer carrier door with form fitting mechanism cover
- Patent number 6,749,067
- Issue date Jun 15, 2004
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier door and latching mechanism withhourglass shaped key...
- Patent number 6,712,213
- Issue date Mar 30, 2004
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite substrate carrier
- Patent number 6,428,729
- Issue date Aug 6, 2002
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Disk carrier with transponder
- Patent number 6,164,530
- Issue date Dec 26, 2000
- Fluoroware, Inc.
- Nicholas T. Cheesebrow
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Composite transport carrier
- Patent number 6,039,186
- Issue date Mar 21, 2000
- Fluoroware, Inc.
- Sanjiv M. Bhatt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Latch for wafer storage box for manual or robot operation
- Patent number 5,123,681
- Issue date Jun 23, 1992
- Fluoroware, Inc.
- Robert D. Kos
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR FRONT GAS DELIVERY INTO A CONTAINER
- Publication number 20250029856
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20250029815
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULE RETAINER
- Publication number 20250029857
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20250029858
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GUIDED DIFFUSION DEVICE BRACKETS AND METHODS FOR DIFFUSION DEVICE R...
- Publication number 20240412995
- Publication date Dec 12, 2024
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER, AND DOOR LOCKING MECHANISM THEREOF
- Publication number 20240412994
- Publication date Dec 12, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20240363380
- Publication date Oct 31, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER
- Publication number 20240222172
- Publication date Jul 4, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230377925
- Publication date Nov 23, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF INSTALLING A PURGE FLUID CONDITIONING ELEMENT INTO A SEM...
- Publication number 20230197489
- Publication date Jun 22, 2023
- Entegris, Inc.
- Matthew A. FULLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
- Publication number 20230187246
- Publication date Jun 15, 2023
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO REGULATE PURGE INTO A CONTAINER
- Publication number 20230131451
- Publication date Apr 27, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230128154
- Publication date Apr 27, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE PORT FILTER SUPPORT
- Publication number 20230099075
- Publication date Mar 30, 2023
- Entegris, Inc.
- Shawn D. Eggum
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
RETICLE POD WITH WINDOW
- Publication number 20210109439
- Publication date Apr 15, 2021
- Entegris, Inc.
- Shawn D. EGGUM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
- Publication number 20210057248
- Publication date Feb 25, 2021
- Entegris, Inc.
- Russ V. RASCHKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE CONNECTORS AND MODULES FOR A SUBSTRATE CONTAINER
- Publication number 20200343117
- Publication date Oct 29, 2020
- Entegris, Inc.
- Shawn D. EGGUM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
- Publication number 20200211876
- Publication date Jul 2, 2020
- Entegris, Inc.
- Russ V. RASCHKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER FOR HOLDING AND TRANSPORTING RETICLES HAVING A TRANSPAREN...
- Publication number 20200159109
- Publication date May 21, 2020
- Entegris, Inc.
- Russ V. RASCHKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE SUPPORT FOR A CONTAINER
- Publication number 20200144086
- Publication date May 7, 2020
- Entegris, Inc.
- Anthony Mathius TIEBEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE SUBSTRATE CARRIER
- Publication number 20130134624
- Publication date May 30, 2013
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
COMPOSITE SUBSTRATE CARRIER
- Publication number 20120061288
- Publication date Mar 15, 2012
- Entegris, Inc.
- Sanjiv M. BHATT
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
COMPOSITE SUBSTRATE CARRIER
- Publication number 20100236970
- Publication date Sep 23, 2010
- Entegris, Inc.
- Sanjiv M. BHATT
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Composite substrate carrier
- Publication number 20070193907
- Publication date Aug 23, 2007
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Fuel cell manifold
- Publication number 20060060244
- Publication date Mar 23, 2006
- Shawn D. Eggum
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Wafer carrier door and spring biased latching mechanism
- Publication number 20060001272
- Publication date Jan 5, 2006
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor component handling device having a performance film
- Publication number 20050236110
- Publication date Oct 27, 2005
- Sanjiv M. Bhatt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composite substrate carrier
- Publication number 20050167312
- Publication date Aug 4, 2005
- Entegris, Inc.
- Sanjiv M. Bhatt
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Connector assembly for fluid transfer
- Publication number 20050147864
- Publication date Jul 7, 2005
- Shawn D. Eggum
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Wafer support attachment for a semi-conductor wafer transport conta...
- Publication number 20050109666
- Publication date May 26, 2005
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS

Shawn D. Eggum

Person

Patents Grantslast 30 patents

Reticle pod with window

Reticle pod having side containment of reticle

Container for holding and transporting reticles having a transparen...

Reticle pod having side containment of reticle

Purge connectors and modules for a substrate container

Composite substrate carrier

Wafer carrier door and spring biased latching mechanism

Composite substrate carrier

Wafer support attachment for a semi-conductor wafer transport conta...

Connector assembly for fluid transfer

Wafer carrier door and latching mechanism with c-shaped cam follower

Wafer carrier with wafer retaining system

Wafer carrier door and spring biased latching mechanism

Composite substrate carrier

Wafer enclosure sealing arrangement for wafer containers

Wafer support attachment for a semi-conductor wafer transport conta...

Process for fabricating composite substrate carrier

Wafer carrier door with form fitting mechanism cover

Wafer carrier door and latching mechanism withhourglass shaped key...

Composite substrate carrier

Disk carrier with transponder

Composite transport carrier

Latch for wafer storage box for manual or robot operation

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR FRONT GAS DELIVERY INTO A CONTAINER

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

MODULE RETAINER

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

GUIDED DIFFUSION DEVICE BRACKETS AND METHODS FOR DIFFUSION DEVICE R...

SUBSTRATE CONTAINER, AND DOOR LOCKING MECHANISM THEREOF

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

METHODS OF INSTALLING A PURGE FLUID CONDITIONING ELEMENT INTO A SEM...

RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE

METHOD AND DEVICE TO REGULATE PURGE INTO A CONTAINER

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

PURGE PORT FILTER SUPPORT

RETICLE POD WITH WINDOW

RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE

PURGE CONNECTORS AND MODULES FOR A SUBSTRATE CONTAINER

RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE

CONTAINER FOR HOLDING AND TRANSPORTING RETICLES HAVING A TRANSPAREN...

RETICLE SUPPORT FOR A CONTAINER

COMPOSITE SUBSTRATE CARRIER

COMPOSITE SUBSTRATE CARRIER

COMPOSITE SUBSTRATE CARRIER

Composite substrate carrier

Fuel cell manifold

Wafer carrier door and spring biased latching mechanism

Semiconductor component handling device having a performance film

Composite substrate carrier

Connector assembly for fluid transfer

Wafer support attachment for a semi-conductor wafer transport conta...