Sheila Vaidya

Person

Watchung, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical lithographical imaging system including optical transmissio...
- Patent number RE35753
- Issue date Mar 24, 1998
- Lucent Technologies Inc.
- Eric L. Raab
- 430 - Radiation imagery chemistry: process, composition, or product thereof
Information Patent Grant
Planar isolation technique for integrated circuits
- Patent number 5,373,180
- Issue date Dec 13, 1994
- AT&T Corp.
- Steven J. Hillenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phase-shifting lithographic masks with improved resolution
- Patent number 5,358,827
- Issue date Oct 25, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fabrication of phase-shifting lithographic masks
- Patent number 5,338,626
- Issue date Aug 16, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical lithographical imaging system including optical transmissio...
- Patent number 5,320,918
- Issue date Jun 14, 1994
- AT&T Bell Laboratories
- Eric L. Raab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Single-alignment-level lithographic technique for achieving self-al...
- Patent number 5,275,896
- Issue date Jan 4, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making phase-shifting lithographic masks
- Patent number 5,153,083
- Issue date Oct 6, 1992
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self aligned registration marks for integrated circuit fabrication
- Patent number 4,992,394
- Issue date Feb 12, 1991
- AT&T Bell Laboratories
- Robert L. Kostelak
- H01 - BASIC ELECTRIC ELEMENTS

Sheila Vaidya

Person

Patents Grantslast 30 patents

Optical lithographical imaging system including optical transmissio...

Planar isolation technique for integrated circuits

Phase-shifting lithographic masks with improved resolution

Fabrication of phase-shifting lithographic masks

Optical lithographical imaging system including optical transmissio...

Single-alignment-level lithographic technique for achieving self-al...

Method of making phase-shifting lithographic masks

Self aligned registration marks for integrated circuit fabrication