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Shepard D. Johnson
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Arlington, MA, US
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last 30 patents
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Patent Grant
Lens focus shift sensor
Patent number
5,991,004
Issue date
Nov 23, 1999
MRS Technology, Inc.
John D. Wallace
G02 - OPTICS
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Patent Grant
Alignment system for use in lithography utilizing a spherical refle...
Patent number
5,483,345
Issue date
Jan 9, 1996
MRS Technology, Inc.
J. Casey Donaher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY