Number | Name | Date | Kind |
---|---|---|---|
4549084 | Markle | Oct 1985 | |
5189494 | Muraki | Feb 1993 |
Number | Date | Country |
---|---|---|
0253442 | Jan 1988 | EPX |
55-33679 | Mar 1980 | JPX |
61-117831 | May 1986 | JPX |
63-185024 | Jul 1988 | JPX |
4-186716 | Jul 1992 | JPX |
Entry |
---|
Gregoris, Dennis, and Ristic, Velimir M., "Moire interferometric focusing system for optical microlithography," Applied Optics, 2 20 (Oct. 15, 1987). |