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Shigeaki Hijikata
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Ome, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of inspecting pattern and inspecting instrument
Patent number
8,558,173
Issue date
Oct 15, 2013
Hitachi, Ltd.
Mari Nozoe
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection method and defect inspection system
Patent number
8,358,406
Issue date
Jan 22, 2013
Hitachi High-Technologies Corporation
Masami Ikota
G01 - MEASURING TESTING
Information
Patent Grant
Method of inspecting pattern and inspecting instrument
Patent number
7,112,791
Issue date
Sep 26, 2006
Hitachi Tokyo Electronics Co. Ltd.
Mari Nozoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of inspecting pattern and inspecting instrument
Patent number
6,777,677
Issue date
Aug 17, 2004
Hitachi, Ltd.
Mari Nozoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of inspecting pattern and inspecting instrument
Patent number
6,583,414
Issue date
Jun 24, 2003
Hitachi, Ltd.
Mari Nozoe
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION SYSTEM
Publication number
20090180109
Publication date
Jul 16, 2009
Hitachi High-Technologies Corporation
Masami Ikota
G01 - MEASURING TESTING
Information
Patent Application
DATA PROCESSING APPARATUS AND DATA PROCESSING METHOD
Publication number
20080298669
Publication date
Dec 4, 2008
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Application
Method of inspecting pattern and inspecting instrument
Publication number
20070023658
Publication date
Feb 1, 2007
Mari Nozoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of inspecting pattern and inspecting instrument
Publication number
20050006583
Publication date
Jan 13, 2005
Mari Nozoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of inspecting pattern and inspecting instrument
Publication number
20030213909
Publication date
Nov 20, 2003
Mari Nozoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of inspecting pattern and inspecting instrument
Publication number
20010017878
Publication date
Aug 30, 2001
Mari Nozoe
G01 - MEASURING TESTING