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Shigeaki Takahashi
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Yamanashi-ken, JP
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last 30 patents
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Patent Grant
Probe method and apparatus for inspecting an object
Patent number
6,111,421
Issue date
Aug 29, 2000
Tokyo Electron Limited
Shigeaki Takahashi
G01 - MEASURING TESTING
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Patent Grant
Probe system and probe method
Patent number
5,640,101
Issue date
Jun 17, 1997
Tokyo Electron Limited
Motohiro Kuji
G01 - MEASURING TESTING
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Patent Grant
Probe system having vertical height detection and double focal imag...
Patent number
5,585,738
Issue date
Dec 17, 1996
Tokyo Electron Limited
Motohiro Kuji
G01 - MEASURING TESTING