Number | Date | Country | Kind |
---|---|---|---|
6-085759 | Mar 1994 | JPX | |
6-104614 | Apr 1994 | JPX | |
6-104615 | Apr 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4929893 | Sato et al. | May 1990 | |
5321352 | Takebuchi | Jun 1994 | |
5412329 | Iino et al. | May 1995 |
Number | Date | Country |
---|---|---|
1-94631 | Apr 1989 | JPX |
1-119036 | May 1989 | JPX |
WO9208144 | May 1992 | WOX |
Entry |
---|
Patent Abstracts of Japan, vol. 17, No. 625 (E-1461), Nov. 18, 1993, JP-A-05 198662, Aug. 6, 1993. |
11th International Electronics Manufacturing Technology Symposium, pp. 429-433, Sep. 16-18, 1991, Tomoaki Sakata, et al., "Prober for Highly Integrated Multichip Modules". |