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Shigehito Ibuka
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Higashiyamato, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of cleaning a process tube
Patent number
5,254,176
Issue date
Oct 19, 1993
Tokyo Electron Limited
Shigehito Ibuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for the manufacture of boron-containing films by CVD or epit...
Patent number
5,180,692
Issue date
Jan 19, 1993
Tokyo Electron Limited
Shigehito Ibuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implantation device
Patent number
5,070,275
Issue date
Dec 3, 1991
Tokyo Electron Limited
Shigehito Ibuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for heat-treating a substrate
Patent number
4,958,061
Issue date
Sep 18, 1990
Tokyo Electron Limited
Tsuyoshi Wakabayashi
H01 - BASIC ELECTRIC ELEMENTS