Shigekazu Komatsu

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Maintenance carriage for wafer inspection apparatus and maintenance...
- Patent number 9,671,459
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Probe
- Patent number 8,766,658
- Issue date Jul 1, 2014
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Structure of probe card for inspecting electrical characteristics o...
- Patent number 8,723,544
- Issue date May 13, 2014
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Holding member for use in test and method for manufacturing same
- Patent number 8,468,690
- Issue date Jun 25, 2013
- Tokyo Electron Limited
- Yasunori Kumagai
- G01 - MEASURING TESTING
Information Patent Grant
Method for evaluating semiconductor device
- Patent number 8,471,585
- Issue date Jun 25, 2013
- Tokyo Electron Limited
- Mitsuyoshi Miyazono
- G01 - MEASURING TESTING
Information Patent Grant
Holding member for inspection, inspection device and inspecting method
- Patent number 8,159,245
- Issue date Apr 17, 2012
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Probe method, prober, and electrode reducing/plasma-etching process...
- Patent number 7,750,654
- Issue date Jul 6, 2010
- Octec Inc.
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Grant
Circuit for protecting DUT, method for protecting DUT, testing appa...
- Patent number 7,701,241
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Yasunori Kumagai
- G01 - MEASURING TESTING
Information Patent Grant
Probe card and probe device for inspection of a semiconductor device
- Patent number 7,692,435
- Issue date Apr 6, 2010
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus for inspecting electrica...
- Patent number 7,688,088
- Issue date Mar 30, 2010
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, probe card and inspection method
- Patent number 7,586,317
- Issue date Sep 8, 2009
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection equipment
- Patent number 7,301,357
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- Dai Shinozaki
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus for inspecting electrica...
- Patent number 7,262,618
- Issue date Aug 28, 2007
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus for inspecting electrica...
- Patent number 7,262,613
- Issue date Aug 28, 2007
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Probe mark reading device and probe mark reading method
- Patent number 7,224,175
- Issue date May 29, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Hiromi Chaya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Probe apparatus with optical length-measuring unit and probe testin...
- Patent number 7,221,177
- Issue date May 22, 2007
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus for inspecting electrica...
- Patent number 7,135,883
- Issue date Nov 14, 2006
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Probe mark reading device and probe mark reading method
- Patent number 7,026,832
- Issue date Apr 11, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Hiromi Chaya
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER
- Publication number 20170234924
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR INSPECTION SYSTEM AND METHOD FOR PREVENTING CONDENATI...
- Publication number 20150145540
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
MAINTENANCE CARRIAGE FOR WAFER INSPECTION APPARATUS AND MAINTENANCE...
- Publication number 20150115991
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Application
PROBE CARD
- Publication number 20120194213
- Publication date Aug 2, 2012
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
ACTUATOR AND SHEET-SHAPED ACTUATOR
- Publication number 20120180475
- Publication date Jul 19, 2012
- UNIVERSITY OF YAMANASHI
- Masahiro Shimizu
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Application
PROBE CARD
- Publication number 20110234251
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
PROBE
- Publication number 20110115514
- Publication date May 19, 2011
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Method for evaluating semiconductor device
- Publication number 20110050269
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Mitsuyoshi Miyazono
- G01 - MEASURING TESTING
Information Patent Application
HOLDING MEMBER FOR USE IN TEST AND METHOD FOR MANUFACTURING SAME
- Publication number 20110025344
- Publication date Feb 3, 2011
- TOKYO ELECTRON LIMITED
- Yasunori Kumagai
- G01 - MEASURING TESTING
Information Patent Application
HOLDING MEMBER FOR INSPECTION, INSPECTION DEVICE AND INSPECTING METHOD
- Publication number 20100033199
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, PROBE CARD AND INSPECTION METHOD
- Publication number 20090021272
- Publication date Jan 22, 2009
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus for inspecting electrica...
- Publication number 20080174325
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
CIRCUIT FOR PROTECTING DUT, METHOD FOR PROTECTING DUT, TESTING APPA...
- Publication number 20070223156
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Yasunori Kumagai
- G01 - MEASURING TESTING
Information Patent Application
Probe card and probe device
- Publication number 20070182431
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus for inspecting electrica...
- Publication number 20070063725
- Publication date Mar 22, 2007
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus for inspecting electrica...
- Publication number 20070040549
- Publication date Feb 22, 2007
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus for inspecting electrica...
- Publication number 20060145716
- Publication date Jul 6, 2006
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Probe mark reading device and probe mark reading method
- Publication number 20060139628
- Publication date Jun 29, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Hiromi Chaya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection method and inspection apparatus for inspecting electrica...
- Publication number 20060097743
- Publication date May 11, 2006
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection equipment
- Publication number 20060061374
- Publication date Mar 23, 2006
- Dai Shinozaki
- G01 - MEASURING TESTING
Information Patent Application
Probe apparatus with optical length-measuring unit and probe testin...
- Publication number 20050253613
- Publication date Nov 17, 2005
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING
Information Patent Application
Probe method, prober, and electrode reducing/plasma-etching process...
- Publication number 20050151549
- Publication date Jul 14, 2005
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Application
Probe mark reading device and probe mark reading method
- Publication number 20040081349
- Publication date Apr 29, 2004
- Dainippon Screen Mfg, Co., Ltd.
- Hiromi Chaya
- G06 - COMPUTING CALCULATING COUNTING

Shigekazu Komatsu

Person

Patents Grantslast 30 patents

Maintenance carriage for wafer inspection apparatus and maintenance...

Probe

Structure of probe card for inspecting electrical characteristics o...

Holding member for use in test and method for manufacturing same

Method for evaluating semiconductor device

Holding member for inspection, inspection device and inspecting method

Probe method, prober, and electrode reducing/plasma-etching process...

Circuit for protecting DUT, method for protecting DUT, testing appa...

Probe card and probe device for inspection of a semiconductor device

Inspection method and inspection apparatus for inspecting electrica...

Inspection apparatus, probe card and inspection method

Inspection method and inspection equipment

Inspection method and inspection apparatus for inspecting electrica...

Inspection method and inspection apparatus for inspecting electrica...

Probe mark reading device and probe mark reading method

Probe apparatus with optical length-measuring unit and probe testin...

Inspection method and inspection apparatus for inspecting electrica...

Probe mark reading device and probe mark reading method

Patents Applicationslast 30 patents

WAFER INSPECTION SYSTEM, WAFER INSPECTION APPARATUS AND PROBER

SEMICONDUCTOR INSPECTION SYSTEM AND METHOD FOR PREVENTING CONDENATI...

MAINTENANCE CARRIAGE FOR WAFER INSPECTION APPARATUS AND MAINTENANCE...

PROBE CARD

ACTUATOR AND SHEET-SHAPED ACTUATOR

PROBE CARD

PROBE

Method for evaluating semiconductor device

HOLDING MEMBER FOR USE IN TEST AND METHOD FOR MANUFACTURING SAME

HOLDING MEMBER FOR INSPECTION, INSPECTION DEVICE AND INSPECTING METHOD

INSPECTION APPARATUS, PROBE CARD AND INSPECTION METHOD

Inspection method and inspection apparatus for inspecting electrica...

CIRCUIT FOR PROTECTING DUT, METHOD FOR PROTECTING DUT, TESTING APPA...

Probe card and probe device

Inspection method and inspection apparatus for inspecting electrica...

Inspection method and inspection apparatus for inspecting electrica...

Inspection method and inspection apparatus for inspecting electrica...

Probe mark reading device and probe mark reading method

Inspection method and inspection apparatus for inspecting electrica...

Inspection method and inspection equipment

Probe apparatus with optical length-measuring unit and probe testin...

Probe method, prober, and electrode reducing/plasma-etching process...

Probe mark reading device and probe mark reading method