Probe card and probe device

Abstract

The probe card is configured such that the outline of the probe card is formed almost round shape and a plurality of connectors for being electrically connected with a tester are provided on the upper surface thereof along the outline. A substrate with many probes arranged thereon is provided on the bottom surface of the probe card. The substrate and the connectors are connected with one another via a flexible print wiring board.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view schematically showing the structure of a probe card according to an embodiment of the present invention, as viewed from the upper side.

FIG. 2 is a plan view schematically showing the top side structure of the probe card shown in FIG. 1.

FIG. 3 is a cross-sectional view schematically showing the probe card shown in FIG. 2, taken on line A-A.

FIG. 4 is a perspective view schematically showing a portion of the probe card shown in FIG. 1.

FIG. 5 is a view schematically showing the state where the probe card shown in FIG. 1 is depicted in comparison with a conventional probe card.

Claims

1. A probe card, comprising: a connector to be electrically connected with a tester which supplies a signal to a semiconductor device for inspection;a substrate having a plurality of probes to be contacted with electrode pads of said semiconductor device and an electric wiring pattern formed commensurate with said probes; anda flexible connector to electrically connect said connector and said substrate.

2. The probe card as set forth in claim 1, wherein the height of said probes is adjustable through a length control of said flexible connector.

3. The probe card as set forth in claim 1, wherein said flexible connector is a cable.

4. The probe card as set forth in claim 1, wherein said flexible connector is a flexible print circuit board.

5. The probe card as set forth in claim 1, further comprising a ring-shaped frame configured such that said connector is provided at said frame.

6. A probe device, comprising a probe card, said probe card, comprising: a connector to be electrically connected with a tester which supplies a signal to a semiconductor device for inspection;a substrate having a plurality of probes to be contacted with electrode pads of said semiconductor device and an electric wiring pattern formed commensurate with said probes; anda flexible connector to electrically connect said connector and said substrate.

7. The probe device as set forth in claim 6, wherein the height of said probes is adjustable through a length control of said flexible connector.

8. The probe device as set forth in claim 6, wherein said flexible connector is a cable.

9. The probe device as set forth in claim 6, wherein said flexible connector is a flexible print circuit board.

10. The probe device as set forth in claim 6, wherein said probe card further comprises a ring-shaped frame configured such that said connector is provided at said frame.