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Shigemitsu Sato

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  • Chigasaki-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SPUTTERING DEPOSITION APPARATUS AND ADHESION PREVENTING MEMBER
    • Publication number 20130098757
    • Publication date Apr 25, 2013
    • ULVAC, Inc.
    • Tetsuhiro OHNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER DEPOSITION APPARATUS
    • Publication number 20130092533
    • Publication date Apr 18, 2013
    • ULVAC, Inc.
    • Shigemitsu Sato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER DEPOSITION APPARATUS
    • Publication number 20130068614
    • Publication date Mar 21, 2013
    • ULVAC, Inc.
    • Tatsunori Isobe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum Processing Apparatus
    • Publication number 20110180402
    • Publication date Jul 28, 2011
    • ULVAC, Inc.
    • Takaomi Kurata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Sputter source, sputtering device, and sputtering method
    • Publication number 20040231973
    • Publication date Nov 25, 2004
    • ULVAC, Inc.
    • Shigemitsu Sato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...