Shigenori Kitahara

Person

Chikugo-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Joining device and joining system
- Patent number 9,960,069
- Issue date May 1, 2018
- Tokyo Electron Limited
- Shintaro Sugihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joining device and joining system
- Patent number 9,922,859
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Shintaro Sugihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus and process liquid supplying method
- Patent number 8,491,726
- Issue date Jul 23, 2013
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 8,282,744
- Issue date Oct 9, 2012
- Tokyo Electron Limited
- Shigenori Kitahara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Ultrasonic cleaning apparatus
- Patent number 7,108,003
- Issue date Sep 19, 2006
- Tokyo Electron Limited
- Shigenori Kitahara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Processing apparatus, processing system and processing method
- Patent number 6,827,814
- Issue date Dec 7, 2004
- Tokyo Electron Limited
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and cleaning equipment
- Patent number 6,592,678
- Issue date Jul 15, 2003
- Tokyo Electron Limited
- Yuji Kamikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,394,110
- Issue date May 28, 2002
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment apparatus
- Patent number 6,318,386
- Issue date Nov 20, 2001
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,299,696
- Issue date Oct 9, 2001
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and apparatus
- Patent number 6,293,288
- Issue date Sep 25, 2001
- Tokyo Electron Limited
- Naoki Shindo
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus
- Patent number 6,253,775
- Issue date Jul 3, 2001
- Tokyo Electron Limited
- Shigenori Kitahara
- B08 - CLEANING
Information Patent Grant
Cleaning method
- Patent number 6,203,627
- Issue date Mar 20, 2001
- Tokyo Electron Limited
- Naoki Shindo
- B08 - CLEANING
Information Patent Grant
Cleaning method and cleaning equipment
- Patent number 6,158,447
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaning apparatus
- Patent number 6,138,698
- Issue date Oct 31, 2000
- Tokyo Electron Limited
- Hiroshi Tanaka
- B08 - CLEANING
Information Patent Grant
Treatment apparatus
- Patent number 6,082,381
- Issue date Jul 4, 2000
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Drying treatment method and apparatus
- Patent number 6,029,371
- Issue date Feb 29, 2000
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporting and processing system
- Patent number 6,009,890
- Issue date Jan 4, 2000
- Tokyo Electron Limited
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonic cleaning device
- Patent number 5,911,232
- Issue date Jun 15, 1999
- Tokyo Electron, Ltd.
- Shori Mokuo
- B08 - CLEANING
Information Patent Grant
Method for washing substrates
- Patent number 5,817,185
- Issue date Oct 6, 1998
- Tokyo Electron Limited
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for washing substrates
- Patent number 5,730,162
- Issue date Mar 24, 1998
- Tokyo Electron Limited
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus
- Patent number 5,482,068
- Issue date Jan 9, 1996
- Tokyo Electron Limited
- Shigenori Kitahara
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
JOINING DEVICE AND JOINING SYSTEM
- Publication number 20140208557
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Shintaro SUGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JOINING DEVICE AND JOINING SYSTEM
- Publication number 20140208556
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Shintaro SUGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JOINING METHOD, JOINING DEVICE AND JOINING SYSTEM
- Publication number 20130327463
- Publication date Dec 12, 2013
- TOKYO ELECTRON LIMITED
- Shigenori Kitahara
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE ETCHING METHOD AND SUBSTRATE ETCHING APPARATUS
- Publication number 20130078747
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Haruo IWATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20100043830
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Shigenori KITAHARA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20100047932
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Shigenori Kitahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and process liquid supplying method
- Publication number 20090078287
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Application
Ultrasonic cleaning apparatus
- Publication number 20030133851
- Publication date Jul 17, 2003
- TOKYO ELECTRON LIMITED
- Shigenori Kitahara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20010045224
- Publication date Nov 29, 2001
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus, processing system and processing method
- Publication number 20010037858
- Publication date Nov 8, 2001
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning method and apparatus
- Publication number 20010009156
- Publication date Jul 26, 2001
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20010004898
- Publication date Jun 28, 2001
- TOKYO ELECTRON LIMITED OF JAPAN
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS

Shigenori Kitahara

Person

Patents Grantslast 30 patents

Joining device and joining system

Joining device and joining system

Liquid processing apparatus and process liquid supplying method

Substrate processing apparatus, substrate processing method, substr...

Ultrasonic cleaning apparatus

Processing apparatus, processing system and processing method

Cleaning method and cleaning equipment

Substrate processing apparatus and substrate processing method

Treatment apparatus

Substrate processing apparatus and substrate processing method

Cleaning method and apparatus

Cleaning apparatus

Cleaning method

Cleaning method and cleaning equipment

Ultrasonic cleaning apparatus

Treatment apparatus

Drying treatment method and apparatus

Substrate transporting and processing system

Ultrasonic cleaning device

Method for washing substrates

Apparatus and method for washing substrates

Cleaning apparatus

Patents Applicationslast 30 patents

JOINING DEVICE AND JOINING SYSTEM

JOINING DEVICE AND JOINING SYSTEM

JOINING METHOD, JOINING DEVICE AND JOINING SYSTEM

SUBSTRATE ETCHING METHOD AND SUBSTRATE ETCHING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

Liquid processing apparatus and process liquid supplying method

Ultrasonic cleaning apparatus

Substrate processing apparatus and substrate processing method

Processing apparatus, processing system and processing method

Cleaning method and apparatus

Substrate processing apparatus and substrate processing method