Shigenori YAMASHITA

Person

Itami, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method and manufacturing system of semiconductor device
- Patent number 8,043,772
- Issue date Oct 25, 2011
- Renesas Electronics Corporation
- Toshiharu Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask, semiconductor device, and method for exposing through ph...
- Patent number 6,617,080
- Issue date Sep 9, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Toshihide Kawachi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Registration accuracy measurement mark, method of repairing defect...
- Patent number 6,323,560
- Issue date Nov 27, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Narimatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Registration accuracy measurement mark, method of repairing defect...
- Patent number 6,068,952
- Issue date May 30, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Narimatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Registration accuracy measurement mark
- Patent number 5,892,291
- Issue date Apr 6, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Narimatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,830,607
- Issue date Nov 3, 1998
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,674,647
- Issue date Oct 7, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD AND MANUFACTURING SYSTEM OF SEMICONDUCTOR DEVICE
- Publication number 20090286174
- Publication date Nov 19, 2009
- Renesas Technology Corp.
- Toshiharu MIWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shigenori YAMASHITA

Person

Patents Grantslast 30 patents

Manufacturing method and manufacturing system of semiconductor device

Photomask, semiconductor device, and method for exposing through ph...

Registration accuracy measurement mark, method of repairing defect...

Registration accuracy measurement mark, method of repairing defect...

Registration accuracy measurement mark

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Patents Applicationslast 30 patents

MANUFACTURING METHOD AND MANUFACTURING SYSTEM OF SEMICONDUCTOR DEVICE