Shigeo Koya

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cover member, conveying apparatus, lithography apparatus, and metho...
- Patent number 10,509,335
- Issue date Dec 17, 2019
- Canon Kabushiki Kaisha
- Kazunori Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cover member, conveying apparatus, lithography apparatus, and metho...
- Patent number 10,185,233
- Issue date Jan 22, 2019
- Canon Kabushiki Kaisha
- Kazunori Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holder, lithography apparatus, and method of manufacturing article
- Patent number 9,104,108
- Issue date Aug 11, 2015
- Canon Kabushiki Kaisha
- Shigeo Koya
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Charged particle beam drawing apparatus and method of manufacturing...
- Patent number 8,766,215
- Issue date Jul 1, 2014
- Canon Kabushiki Kaisha
- Shigeo Koya
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240290650
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- KAZUNORI NAKAJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROMAGNETIC DEVICE, ALIGNMENT APPARATUS, AND ARTICLE MANUFACTUR...
- Publication number 20230352225
- Publication date Nov 2, 2023
- Canon Kabushiki Kaisha
- Takeshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING ME...
- Publication number 20230110011
- Publication date Apr 13, 2023
- Canon Kabushiki Kaisha
- Takahiro Sumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER MEMBER, CONVEYING APPARATUS, LITHOGRAPHY APPARATUS, AND METHO...
- Publication number 20190107788
- Publication date Apr 11, 2019
- Canon Kabushiki Kaisha
- Kazunori Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COVER MEMBER, CONVEYING APPARATUS, LITHOGRAPHY APPARATUS, AND METHO...
- Publication number 20170285494
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Kazunori Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDER, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140295355
- Publication date Oct 2, 2014
- Canon Kabushiki Kaisha
- Shigeo Koya
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HOLDING APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING A...
- Publication number 20130149647
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Yuji Maehara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING...
- Publication number 20130020502
- Publication date Jan 24, 2013
- Canon Kabushiki Kaisha
- Shigeo Koya
- B82 - NANO-TECHNOLOGY

Shigeo Koya

Person

Patents Grantslast 30 patents

Cover member, conveying apparatus, lithography apparatus, and metho...

Cover member, conveying apparatus, lithography apparatus, and metho...

Holder, lithography apparatus, and method of manufacturing article

Charged particle beam drawing apparatus and method of manufacturing...

Patents Applicationslast 30 patents

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

ELECTROMAGNETIC DEVICE, ALIGNMENT APPARATUS, AND ARTICLE MANUFACTUR...

STAGE APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING ME...

COVER MEMBER, CONVEYING APPARATUS, LITHOGRAPHY APPARATUS, AND METHO...

COVER MEMBER, CONVEYING APPARATUS, LITHOGRAPHY APPARATUS, AND METHO...

HOLDER, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

HOLDING APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING A...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING...