Shigeru NAKAJIMA

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,881,379
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal contamination prevention method and apparatus, and substrate...
- Patent number 11,486,043
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,272
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,271
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,047,044
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,879,066
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,191,378
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,176,992
- Issue date Jan 8, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,141,187
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method
- Patent number 9,777,366
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling gas supply apparatus and substrate processing...
- Patent number 9,758,867
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,466,478
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method
- Patent number 9,422,624
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method and film forming apparatus
- Patent number 9,145,604
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a germanium thin film
- Patent number 8,815,714
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 8,426,117
- Issue date Apr 23, 2013
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Micro pattern forming method
- Patent number 8,383,522
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film formation method for forming silicon-containing insulating film
- Patent number 8,357,619
- Issue date Jan 22, 2013
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method for using same
- Patent number 8,349,401
- Issue date Jan 8, 2013
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrophilic polyolefin sintered body
- Patent number 8,318,824
- Issue date Nov 27, 2012
- ASAHI KASEI CHEMICALS CORPORATION
- Naoki Matsuoka
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,168,270
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning method
- Patent number 8,168,375
- Issue date May 1, 2012
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Oxidation method providing parallel gas flow over substrates in a s...
- Patent number 8,124,181
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of modifying insulating film
- Patent number 8,021,987
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterning method
- Patent number 7,989,354
- Issue date Aug 2, 2011
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film formation method and apparatus for forming silicon-containing...
- Patent number 7,923,378
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for forming silicon oxide film
- Patent number 7,906,168
- Issue date Mar 15, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation method and apparatus for semiconductor process
- Patent number 7,795,158
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Takehiko Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterning method utilizing SiBN and photolithography
- Patent number 7,754,622
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Pao-Hwa Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of modifying insulating film
- Patent number 7,655,574
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...
- Publication number 20240295020
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20240096595
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20220328301
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS
- Publication number 20210115560
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Contamination Prevention Method and Apparatus, and Substrate...
- Publication number 20200040463
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190115204
- Publication date Apr 18, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190096658
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190041756
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
- Publication number 20180182652
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Yuji SESHIMO
- G05 - CONTROLLING REGULATING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180179630
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON FILM, BORON FILM FORMING METHOD, HARD MASK, AND HARD MASK MAN...
- Publication number 20180090311
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Takahiro MIYAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20180019113
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20170162381
- Publication date Jun 8, 2017
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20150270126
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Titanium Carbonitride Film and Film Formation App...
- Publication number 20150259792
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAG...
- Publication number 20150211113
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A GERMANIUM THIN FILM
- Publication number 20140331928
- Publication date Nov 13, 2014
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING GAS SUPPLY APPARATUS AND SUBSTRATE PROCESSING...
- Publication number 20140290577
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20140295677
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A GERMANIUM THIN FILM
- Publication number 20130230975
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20130213301
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20130084693
- Publication date Apr 4, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
HYDROPHILIC POLYOLEFIN SINTERED BODY
- Publication number 20120095121
- Publication date Apr 19, 2012
- Naoki Matsuoka
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
MICRO PATTERN FORMING METHOD
- Publication number 20110237082
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM FORMATION METHOD FOR FORMING SILICON-CONTAINING INSULATING FILM
- Publication number 20110151679
- Publication date Jun 23, 2011
- TOKYO ELECTRON LIMITED
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20110065280
- Publication date Mar 17, 2011
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20100319619
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Takehiko FUJITA
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMATION APPARATUS AND METHOD FOR USING SAME
- Publication number 20100189927
- Publication date Jul 29, 2010
- TOKYO ELECTRON LIMITED
- Jun SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNING METHOD
- Publication number 20100130015
- Publication date May 27, 2010
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD
- Publication number 20100112496
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shigeru NAKAJIMA

Person

Patents Grantslast 30 patents

Film deposition apparatus for fine pattern forming

Metal contamination prevention method and apparatus, and substrate...

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Film forming apparatus and film forming method

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Thin film forming method

Method of controlling gas supply apparatus and substrate processing...

Film forming method and film forming apparatus

Heat treatment method

Thin film forming method and film forming apparatus

Method of forming a germanium thin film

Mask pattern forming method, fine pattern forming method, and film...

Micro pattern forming method

Film formation method for forming silicon-containing insulating film

Film formation apparatus and method for using same

Hydrophilic polyolefin sintered body

Film formation method and apparatus for semiconductor process

Patterning method

Oxidation method providing parallel gas flow over substrates in a s...

Method of modifying insulating film

Patterning method

Film formation method and apparatus for forming silicon-containing...

Film formation method and apparatus for forming silicon oxide film

Oxidation method and apparatus for semiconductor process

Patterning method utilizing SiBN and photolithography

Method of modifying insulating film

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS

Metal Contamination Prevention Method and Apparatus, and Substrate...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...

FILM FORMING APPARATUS AND FILM FORMING METHOD

BORON FILM, BORON FILM FORMING METHOD, HARD MASK, AND HARD MASK MAN...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

THIN FILM FORMING METHOD

Method of Forming Titanium Carbonitride Film and Film Formation App...

VERTICAL HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAG...

METHOD OF FORMING A GERMANIUM THIN FILM

METHOD OF CONTROLLING GAS SUPPLY APPARATUS AND SUBSTRATE PROCESSING...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD OF FORMING A GERMANIUM THIN FILM

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

HYDROPHILIC POLYOLEFIN SINTERED BODY

MICRO PATTERN FORMING METHOD

FILM FORMATION METHOD FOR FORMING SILICON-CONTAINING INSULATING FILM

MASK PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING...

OXIDATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS

FILM FORMATION APPARATUS AND METHOD FOR USING SAME

PATTERNING METHOD

PATTERNING METHOD