Shigeru Senzaki

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 10,276,405
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Akinori Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control mechanism, temperature control method and subst...
- Patent number 10,199,246
- Issue date Feb 5, 2019
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dechuck control method and plasma processing apparatus
- Patent number 10,069,443
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Shigeru Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 9,818,582
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Hiraku Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and maintenance method thereof
- Patent number 9,613,837
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 7,481,903
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 6,899,786
- Issue date May 31, 2005
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20160372308
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Hiraku MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL MECHANISM, TEMPERATURE CONTROL METHOD AND SUBST...
- Publication number 20160225645
- Publication date Aug 4, 2016
- Tokyo Electron Limited
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160172217
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Akinori MIYATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160086773
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Shigeru SENZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF
- Publication number 20150086302
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD FOR PRODUCING FILTRATION FILTER
- Publication number 20130240479
- Publication date Sep 19, 2013
- Tsuyoshi MORIYA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR CALCULATING BILL FOR USE OF WATER PURIFICATION SYSTEM AN...
- Publication number 20130226752
- Publication date Aug 29, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WATER TREATMENT DEVICE AND WATER TREATMENT METHOD
- Publication number 20130193087
- Publication date Aug 1, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DECHUCK CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20130153147
- Publication date Jun 20, 2013
- TOKYO ELECTRON LIMITED
- Shigeru SENZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing device and method of maintaining the device, mechanism a...
- Publication number 20050150456
- Publication date Jul 14, 2005
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing device and method of maintaining the device, mechanism a...
- Publication number 20040108068
- Publication date Jun 10, 2004
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS

Shigeru Senzaki

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Temperature control mechanism, temperature control method and subst...

Dechuck control method and plasma processing apparatus

Plasma processing method

Substrate processing apparatus and maintenance method thereof

Processing device and method of maintaining the device, mechanism a...

Processing device and method of maintaining the device, mechanism a...

Patents Applicationslast 30 patents

PLASMA PROCESSING METHOD

TEMPERATURE CONTROL MECHANISM, TEMPERATURE CONTROL METHOD AND SUBST...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF

METHOD FOR PRODUCING FILTRATION FILTER

METHOD FOR CALCULATING BILL FOR USE OF WATER PURIFICATION SYSTEM AN...

WATER TREATMENT DEVICE AND WATER TREATMENT METHOD

DECHUCK CONTROL METHOD AND PLASMA PROCESSING APPARATUS

Processing device and method of maintaining the device, mechanism a...

Processing device and method of maintaining the device, mechanism a...