SHIGERU TERASHIMA

Person

UTSUNOMIYA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus, method of operating the same, and method of manu...
- Patent number 11,036,149
- Issue date Jun 15, 2021
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Supply apparatus which supplies radicals, lithography apparatus, an...
- Patent number 8,980,533
- Issue date Mar 17, 2015
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam drawing apparatus, and method of manufacturin...
- Patent number 8,686,378
- Issue date Apr 1, 2014
- Canon Kabushiki Kaisha
- Shigeru Terashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,665,415
- Issue date Mar 4, 2014
- Canon Kabushiki Kaisha
- Takahiro Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Energy beam drawing apparatus and method of manufacturing device
- Patent number 8,563,950
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Takahiro Nakayama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, control method for the same, and device manufac...
- Patent number 8,004,657
- Issue date Aug 23, 2011
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,738,076
- Issue date Jun 15, 2010
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method, and device manufacturing method
- Patent number 7,724,348
- Issue date May 25, 2010
- Canon Kabushiki Kaisha
- Yoshio Gomei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with tanks storing helium gas and method of manu...
- Patent number 7,566,422
- Issue date Jul 28, 2009
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure apparatus and method of producing device
- Patent number 7,212,273
- Issue date May 1, 2007
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,123,343
- Issue date Oct 17, 2006
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,050,152
- Issue date May 23, 2006
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,027,131
- Issue date Apr 11, 2006
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus, measuring apparatus, and device manufacturing...
- Patent number 6,984,362
- Issue date Jan 10, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure apparatus
- Patent number 6,954,255
- Issue date Oct 11, 2005
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,934,003
- Issue date Aug 23, 2005
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus for processing sample in predetermined atmosphere
- Patent number 6,750,946
- Issue date Jun 15, 2004
- Canon Kabushiki Kaisha
- Yutaka Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus
- Patent number 6,721,031
- Issue date Apr 13, 2004
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and control method therefor, and device manufact...
- Patent number 6,721,032
- Issue date Apr 13, 2004
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus with pressure control and gas recirculation sy...
- Patent number 6,616,898
- Issue date Sep 9, 2003
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
X-ray exposure apparatus
- Patent number 6,603,833
- Issue date Aug 5, 2003
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Exposure method, exposure apparatus and semiconductor manufacturing...
- Patent number 6,463,119
- Issue date Oct 8, 2002
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure device and semiconductor device manufactu...
- Patent number 6,453,000
- Issue date Sep 17, 2002
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask structure, and X-ray exposure method and apparatus using...
- Patent number 6,418,187
- Issue date Jul 9, 2002
- Canon Kabushiki Kaisha
- Keiko Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 6,351,512
- Issue date Feb 26, 2002
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,225,637
- Issue date May 1, 2001
- Canon Kabushiki Kaisha
- Shigeru Terashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,054,713
- Issue date Apr 25, 2000
- Canon Kabushiki Kaisha
- Akira Miyake
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray reduction exposure apparatus and device manufacturing method...
- Patent number 5,995,582
- Issue date Nov 30, 1999
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation window and radiation system using the same
- Patent number 5,790,630
- Issue date Aug 4, 1998
- Canon Kabushiki Kaisha
- Yutaka Watanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray exposure apparatus
- Patent number 5,600,698
- Issue date Feb 4, 1997
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20190366619
- Publication date Dec 5, 2019
- Canon Kabushiki Kaisha
- Shigeru Terashima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANU...
- Publication number 20180356741
- Publication date Dec 13, 2018
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPLY APPARATUS WHICH SUPPLIES RADICALS, LITHOGRAPHY APPARATUS, AN...
- Publication number 20140113235
- Publication date Apr 24, 2014
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS, AND METHOD OF MANUFACTURIN...
- Publication number 20130040240
- Publication date Feb 14, 2013
- Canon Kabushiki Kaisha
- Shigeru Terashima
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...
- Publication number 20120183905
- Publication date Jul 19, 2012
- Canon Kabushiki Kaisha
- Shigeru TERASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
ENERGY BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20120181455
- Publication date Jul 19, 2012
- Canon Kabushiki Kaisha
- Takahiro NAKAYAMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110262866
- Publication date Oct 27, 2011
- Canon Kabushiki Kaisha
- Takahiro Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080304031
- Publication date Dec 11, 2008
- Canon Kabushiki Kaisha
- Mika Kanehira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, CONTROL METHOD FOR THE SAME, AND DEVICE MANUFAC...
- Publication number 20070202423
- Publication date Aug 30, 2007
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060274292
- Publication date Dec 7, 2006
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus, measuring apparatus, and device manufacturing...
- Publication number 20050271558
- Publication date Dec 8, 2005
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050213063
- Publication date Sep 29, 2005
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050030504
- Publication date Feb 10, 2005
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus for processing sample in predetermined atmosphere
- Publication number 20040187786
- Publication date Sep 30, 2004
- Canon Kabushiki Kaisha
- Yutaka Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20040179179
- Publication date Sep 16, 2004
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method of producing device
- Publication number 20040174505
- Publication date Sep 9, 2004
- Canon Kabushiki Kaisha
- Shigeru Terashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus, measuring apparatus, and device manufacturing...
- Publication number 20040022694
- Publication date Feb 5, 2004
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20030169407
- Publication date Sep 11, 2003
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and control method therefor, and device manufact...
- Publication number 20030025889
- Publication date Feb 6, 2003
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20020191163
- Publication date Dec 19, 2002
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20020191166
- Publication date Dec 19, 2002
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
X-ray exposure apparatus
- Publication number 20020106050
- Publication date Aug 8, 2002
- Shigeru Terashima
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20020094306
- Publication date Jul 18, 2002
- SHINICHI HARA
- G05 - CONTROLLING REGULATING
Information Patent Application
Processing apparatus for processing sample in predetermined atmosphere
- Publication number 20020002946
- Publication date Jan 10, 2002
- Yutaka Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

SHIGERU TERASHIMA

Person

Patents Grantslast 30 patents

Imprint apparatus, method of operating the same, and method of manu...

Supply apparatus which supplies radicals, lithography apparatus, an...

Charged particle beam drawing apparatus, and method of manufacturin...

Exposure apparatus and device manufacturing method

Energy beam drawing apparatus and method of manufacturing device

Exposure apparatus, control method for the same, and device manufac...

Exposure apparatus and device manufacturing method

Exposure apparatus and method, and device manufacturing method

Exposure apparatus with tanks storing helium gas and method of manu...

Exposure apparatus and method of producing device

Exposure apparatus and device manufacturing method

Exposure apparatus

Exposure apparatus

Processing apparatus, measuring apparatus, and device manufacturing...

Exposure apparatus

Exposure apparatus and device manufacturing method

Processing apparatus for processing sample in predetermined atmosphere

Exposure apparatus

Exposure apparatus and control method therefor, and device manufact...

Processing apparatus with pressure control and gas recirculation sy...

X-ray exposure apparatus

Exposure method, exposure apparatus and semiconductor manufacturing...

Exposure method, exposure device and semiconductor device manufactu...

X-ray mask structure, and X-ray exposure method and apparatus using...

X-ray exposure apparatus

Electron beam exposure apparatus

Electron beam exposure apparatus

X-ray reduction exposure apparatus and device manufacturing method...

Radiation window and radiation system using the same

X-ray exposure apparatus

Patents Applicationslast 30 patents

IMPRINT APPARATUS AND METHOD FOR MANUFACTURING ARTICLE

IMPRINT APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANU...

SUPPLY APPARATUS WHICH SUPPLIES RADICALS, LITHOGRAPHY APPARATUS, AN...

CHARGED PARTICLE BEAM DRAWING APPARATUS, AND METHOD OF MANUFACTURIN...

CHARGED-PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...

ENERGY BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS

EXPOSURE APPARATUS, CONTROL METHOD FOR THE SAME, AND DEVICE MANUFAC...

Exposure apparatus and device manufacturing method

Processing apparatus, measuring apparatus, and device manufacturing...

Exposure apparatus and device manufacturing method

Exposure apparatus

Processing apparatus for processing sample in predetermined atmosphere

Exposure apparatus

Exposure apparatus and method of producing device

Processing apparatus, measuring apparatus, and device manufacturing...

Exposure apparatus and device manufacturing method

Exposure apparatus and control method therefor, and device manufact...

Exposure apparatus

Exposure apparatus

X-ray exposure apparatus

PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING...

Processing apparatus for processing sample in predetermined atmosphere