Shigeto Izumi

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Patents Grantslast 30 patents

Information Patent Grant
Carriers and polishing apparatus
- Patent number 6,273,803
- Issue date Aug 14, 2001
- SpeedFam Co., Ltd.
- Xu-Jin Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor wafer surface flattening apparatus
- Patent number 6,062,954
- Issue date May 16, 2000
- Speedfam Co., Ltd.
- Shigeto Izumi
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical and mechanical polishing apparatus
- Patent number 6,030,488
- Issue date Feb 29, 2000
- Speedfam Co., Ltd.
- Shigeto Izumi
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,012,964
- Issue date Jan 11, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for applying an urging force to a wafer
- Patent number 5,916,009
- Issue date Jun 29, 1999
- Speedfam Co., Ltd.
- Shigeto Izumi
- B24 - GRINDING POLISHING