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Shih-Chieh Liao
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Jungli City, TW
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last 30 patents
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Patent Grant
Interlock system for semiconductor wafer transport apparatus
Patent number
6,318,946
Issue date
Nov 20, 2001
Taiwan Semiconductor Manufacturing Company, Ltd
Yuh-Dean Tsay
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Systems and methods for inspection control
Publication number
20060178767
Publication date
Aug 10, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Song-Bor Lee
G06 - COMPUTING CALCULATING COUNTING