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Patents Grants
last 30 patents
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,768
Issue date
Apr 30, 2024
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,201,053
Issue date
Dec 14, 2021
Tokyo Electron Limited
Noriaki Fukiage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,171,014
Issue date
Nov 9, 2021
Tokyo Electron Limited
Hideomi Hane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device and apparatus of manuf...
Patent number
10,900,121
Issue date
Jan 26, 2021
Tokyo Electron Limited
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
10,714,332
Issue date
Jul 14, 2020
Tokyo Electron Limited
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and operation method of film forming apparatus
Patent number
10,550,470
Issue date
Feb 4, 2020
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method, film forming apparatus, and storage medium
Patent number
10,438,791
Issue date
Oct 8, 2019
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20210054501
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20210054502
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20200294787
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20190292662
Publication date
Sep 26, 2019
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS
Publication number
20190127849
Publication date
May 2, 2019
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
Publication number
20180366315
Publication date
Dec 20, 2018
TOKYO ELECTRON LIMITED
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180358235
Publication date
Dec 13, 2018
TOKYO ELECTRON LIMITED
Hideomi HANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20180245216
Publication date
Aug 30, 2018
TOKYO ELECTRON LIMITED
Jun OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20180237914
Publication date
Aug 23, 2018
TOKYO ELECTRON LIMITED
Jun OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...
Publication number
20180142350
Publication date
May 24, 2018
TOKYO ELECTRON LIMITED
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Method and Film Forming Apparatus
Publication number
20170271143
Publication date
Sep 21, 2017
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EVAPORATING APPARATUS AND EVAPORATING METHOD
Publication number
20130209666
Publication date
Aug 15, 2013
TOKYO ELECTRON LIMITED
Tomiko Kamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
Publication number
20120094014
Publication date
Apr 19, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...