Shin Matsui

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus with tanks storing helium gas and method of manu...
- Patent number 7,566,422
- Issue date Jul 28, 2009
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Holding system, exposure apparatus, and device manufacturing method
- Patent number 7,218,383
- Issue date May 15, 2007
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding system, exposure apparatus, and device manufacturing method
- Patent number 7,187,432
- Issue date Mar 6, 2007
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, semiconductor manufacturing apparatus and...
- Patent number 7,102,735
- Issue date Sep 5, 2006
- Canon Kabushiki Kaisha
- Shin Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, measuring apparatus, and device manufacturing...
- Patent number 6,984,362
- Issue date Jan 10, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate holding device, semiconductor manufacturing apparatus and...
- Patent number 6,982,784
- Issue date Jan 3, 2006
- Canon Kabushiki Kaisha
- Shin Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus and semiconductor device manufactu...
- Patent number 6,930,756
- Issue date Aug 16, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding device, semiconductor manufacturing apparatus and...
- Patent number 6,862,080
- Issue date Mar 1, 2005
- Canon Kabushiki Kaisha
- Shin Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus with pressure control and gas recirculation sy...
- Patent number 6,616,898
- Issue date Sep 9, 2003
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage system and exposure apparatus with the same
- Patent number 6,408,045
- Issue date Jun 18, 2002
- Canon Kabushiki Kaisha
- Shin Matsui
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Positioning stage system and position measuring method
- Patent number 6,404,505
- Issue date Jun 11, 2002
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,225,637
- Issue date May 1, 2001
- Canon Kabushiki Kaisha
- Shigeru Terashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,054,713
- Issue date Apr 25, 2000
- Canon Kabushiki Kaisha
- Akira Miyake
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,999,589
- Issue date Dec 7, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,930,324
- Issue date Jul 27, 1999
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,883,932
- Issue date Mar 16, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveying apparatus
- Patent number 5,277,539
- Issue date Jan 11, 1994
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Processing Apparatus and Method of Manufacturing Electron Emission...
- Publication number 20100273387
- Publication date Oct 28, 2010
- Canon ANELVA Corporation
- Masato Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK FIXING DEVICE IN VACUUM PROCESSING APPARATUS
- Publication number 20100112194
- Publication date May 6, 2010
- Canon ANELVA Corporation
- Masato Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND IMAGE DISPLAY DEVICE
- Publication number 20100079054
- Publication date Apr 1, 2010
- Canon ANELVA Corporation
- Masato INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDING APPARATUS, CARRIER, SUBSTRATE PROCESSING APPARATU...
- Publication number 20100081355
- Publication date Apr 1, 2010
- Canon ANELVA Corporation
- Masato INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING MECHANISM, PROCESSING APPARATUS INCLUDING HOLDING MECHANISM...
- Publication number 20100080891
- Publication date Apr 1, 2010
- Canon ANELVA Corporation
- Masanao YOSHIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISPLAY SUBSTRATE MANUFACTURING METHOD AND VACUUM PROCESSING APPARATUS
- Publication number 20090088041
- Publication date Apr 2, 2009
- Canon ANELVA Corporation
- Masato Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070061609
- Publication date Mar 15, 2007
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing hermetically sealed container and image dis...
- Publication number 20060042316
- Publication date Mar 2, 2006
- Canon Kabushiki Kaisha
- Mitsutoshi Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate holding device, semiconductor manufacturing apparatus and...
- Publication number 20060033904
- Publication date Feb 16, 2006
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus, measuring apparatus, and device manufacturing...
- Publication number 20050271558
- Publication date Dec 8, 2005
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Holding system, exposure apparatus, and device manufacturing method
- Publication number 20050128462
- Publication date Jun 16, 2005
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate holding device, semiconductor manufacturing apparatus and...
- Publication number 20050018169
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus, measuring apparatus, and device manufacturing...
- Publication number 20040022694
- Publication date Feb 5, 2004
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Electron beam exposure apparatus and semiconductor device manufactu...
- Publication number 20040012765
- Publication date Jan 22, 2004
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20020094306
- Publication date Jul 18, 2002
- SHINICHI HARA
- G05 - CONTROLLING REGULATING
Information Patent Application
POSITIONING STAGE SYSTEM AND POSITION MEASURING METHOD
- Publication number 20020003629
- Publication date Jan 10, 2002
- SHIN MATSUI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate holding device, semiconductor manufacturing apparatus and...
- Publication number 20010033369
- Publication date Oct 25, 2001
- Shin Matsui
- H01 - BASIC ELECTRIC ELEMENTS

Shin Matsui

Person

Patents Grantslast 30 patents

Exposure apparatus with tanks storing helium gas and method of manu...

Holding system, exposure apparatus, and device manufacturing method

Holding system, exposure apparatus, and device manufacturing method

Substrate holding device, semiconductor manufacturing apparatus and...

Processing apparatus, measuring apparatus, and device manufacturing...

Substrate holding device, semiconductor manufacturing apparatus and...

Electron beam exposure apparatus and semiconductor device manufactu...

Substrate holding device, semiconductor manufacturing apparatus and...

Processing apparatus with pressure control and gas recirculation sy...

Stage system and exposure apparatus with the same

Positioning stage system and position measuring method

Electron beam exposure apparatus

Electron beam exposure apparatus

Substrate holding device and exposing apparatus using the same

Exposure apparatus and device manufacturing method using the same

Substrate holding device and exposing apparatus using the same

Substrate conveying apparatus

Patents Applicationslast 30 patents

Processing Apparatus and Method of Manufacturing Electron Emission...

MASK FIXING DEVICE IN VACUUM PROCESSING APPARATUS

PROCESSING APPARATUS AND IMAGE DISPLAY DEVICE

SUBSTRATE HOLDING APPARATUS, CARRIER, SUBSTRATE PROCESSING APPARATU...

HOLDING MECHANISM, PROCESSING APPARATUS INCLUDING HOLDING MECHANISM...

DISPLAY SUBSTRATE MANUFACTURING METHOD AND VACUUM PROCESSING APPARATUS

HOLDING SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Method of manufacturing hermetically sealed container and image dis...

Substrate holding device, semiconductor manufacturing apparatus and...

Processing apparatus, measuring apparatus, and device manufacturing...

Holding system, exposure apparatus, and device manufacturing method

Substrate holding device, semiconductor manufacturing apparatus and...

Processing apparatus, measuring apparatus, and device manufacturing...

Electron beam exposure apparatus and semiconductor device manufactu...

PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING...

POSITIONING STAGE SYSTEM AND POSITION MEASURING METHOD

Substrate holding device, semiconductor manufacturing apparatus and...