Shin-Ya Arase

Person

  • Chiba-shi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Halogenated anti-reflective coatings

    • Publication number 20020192594
    • Publication date Dec 19, 2002
    • Tomoyuki Enomoto
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC