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Chiba-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Halogenated anti-reflective coatings
Patent number
6,680,160
Issue date
Jan 20, 2004
Brewer Science, Inc.
Tomoyuki Enomoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Halogenated anti-reflective coatings
Patent number
6,495,305
Issue date
Dec 17, 2002
Tomoyuki Enomoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Halogenated anti-reflective coatings
Publication number
20020192594
Publication date
Dec 19, 2002
Tomoyuki Enomoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC