Shing Shen Yu

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Immersion lithography system with wafer sealing mechanisms
- Patent number 7,501,226
- Issue date Mar 10, 2009
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process control method
- Patent number 7,356,380
- Issue date Apr 8, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shing-Sheng Yu
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Integrated optical metrology and lithographic process track for dyn...
- Publication number 20060222975
- Publication date Oct 5, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Ming Ke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process control method
- Publication number 20060196960
- Publication date Sep 7, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shing-Sheng Yu
- G05 - CONTROLLING REGULATING
Information Patent Application
Immersion lithography system with wafer sealing mechanisms
- Publication number 20050286033
- Publication date Dec 29, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY