Shingo Okubo

Person

Tsukuba, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition of silicon-containing films using penta-substitute...
- Patent number 9,633,838
- Issue date Apr 25, 2017
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,548,198
- Issue date Jan 17, 2017
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,343,290
- Issue date May 17, 2016
- Hitachi Kokusai Electric, Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal heterocyclic compounds for deposition of thin films
- Patent number 9,109,281
- Issue date Aug 18, 2015
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Julien Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal heterocyclic compounds for deposition of thin films
- Patent number 8,636,845
- Issue date Jan 28, 2014
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Julien Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal piperidinate and metal pyridinate precursors for thin film de...
- Patent number 8,236,381
- Issue date Aug 7, 2012
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Shingo Okubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tellurium precursors for film deposition
- Patent number 8,101,237
- Issue date Jan 24, 2012
- L'Air Liquide SociétéAnonyme pour I'Etude et I'Exploitation des Procédés Geor...
- Shingo Okubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
- Publication number 20240052484
- Publication date Feb 15, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DISPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUT...
- Publication number 20190027357
- Publication date Jan 24, 2019
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...
- Publication number 20170186597
- Publication date Jun 29, 2017
- Jean-Marc GIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON/CARBON COMPOSITE, SILICON ALLOY/CARBON COMPOSITE, AND METHO...
- Publication number 20160118154
- Publication date Apr 28, 2016
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Aurelie DUMONT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...
- Publication number 20160111272
- Publication date Apr 21, 2016
- Jean-Marc GIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140287598
- Publication date Sep 25, 2014
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140287596
- Publication date Sep 25, 2014
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS
- Publication number 20140119977
- Publication date May 1, 2014
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Julien GATINEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PIPERIDINATE AND METAL PYRIDINATE PRECURSORS FOR THIN FILM DE...
- Publication number 20100034695
- Publication date Feb 11, 2010
- Shingo Okubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TELLURIUM PRECURSORS FOR FILM DEPOSITION
- Publication number 20090299084
- Publication date Dec 3, 2009
- Shingo OKUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GERMANIUM PRECURSORS FOR GST FILM DEPOSITION
- Publication number 20090162973
- Publication date Jun 25, 2009
- Julien GATINEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shingo Okubo

Person

Patents Grantslast 30 patents

Vapor deposition of silicon-containing films using penta-substitute...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Metal heterocyclic compounds for deposition of thin films

Metal heterocyclic compounds for deposition of thin films

Metal piperidinate and metal pyridinate precursors for thin film de...

Tellurium precursors for film deposition

Patents Applicationslast 30 patents

SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS

VAPOR DISPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUT...

VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...

SILICON/CARBON COMPOSITE, SILICON ALLOY/CARBON COMPOSITE, AND METHO...

VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS

METAL PIPERIDINATE AND METAL PYRIDINATE PRECURSORS FOR THIN FILM DE...

TELLURIUM PRECURSORS FOR FILM DEPOSITION

GERMANIUM PRECURSORS FOR GST FILM DEPOSITION