Shinichi Kojima

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Wappingers Falls, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Annular illumination method for charged particle projection optics
- Patent number 6,639,221
- Issue date Oct 28, 2003
- Nikon Corporation
- Shinichi Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam microlithography apparatus and methods includ...
- Patent number 6,630,681
- Issue date Oct 7, 2003
- Nikon Corporation
- Shinichi Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance source for electron beam projection lithography
- Patent number 6,596,999
- Issue date Jul 22, 2003
- Nikon Corporation
- Steven D. Golladay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam microlithography methods for exposing a segme...
- Patent number 6,573,014
- Issue date Jun 3, 2003
- Nikon Corporation
- Takeshi Yamaguchi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged-particle-beam optical components and systems including ferr...
- Patent number 6,566,663
- Issue date May 20, 2003
- Nikon Corporation
- Koichi Kamijo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam microlithography methods including correction...
- Patent number 6,027,843
- Issue date Feb 22, 2000
- Nikon Corporation
- Shinichi Kojima
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Charged-particle-beam microlithography apparatus and methods for ex...
- Publication number 20030194652
- Publication date Oct 16, 2003
- NIKON CORPORATION
- Takeshi Yamaguchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
ANNULAR ILLUMINATION METHOD FOR CHARGED PARTICLE PROJECTION OPTICS
- Publication number 20030137314
- Publication date Jul 24, 2003
- Shinichi Kojima
- B82 - NANO-TECHNOLOGY
Information Patent Application
High performance source for electron beam projection lithography
- Publication number 20030085364
- Publication date May 8, 2003
- Steven D. Golladay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for calculating, correcting, and displaying segmented retic...
- Publication number 20020116697
- Publication date Aug 22, 2002
- NIKON CORPORATION
- Kazuya Okamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-particle-beam microlithography apparatus and methods for ex...
- Publication number 20010019812
- Publication date Sep 6, 2001
- Takeshi Yamaguchi
- B82 - NANO-TECHNOLOGY