Shinichi Wada

Person

  • Sagamihara, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate transferring apparatus

    • Patent number 5,445,486
    • Issue date Aug 29, 1995
    • Tokyo Electron Sagami Limited
    • Hirofumi Kitayama
    • H01 - BASIC ELECTRIC ELEMENTS