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Shinichiro Araki
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Information processing apparatus, processing system, processing met...
Patent number
9,256,221
Issue date
Feb 9, 2016
Tokyo Electron Limited
Shinichiro Araki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of detecting extraneous matter on heat processing plate, hea...
Patent number
7,815,366
Issue date
Oct 19, 2010
Tokyo Electron Limited
Kouji Okamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
7,609,361
Issue date
Oct 27, 2009
Tokyo Electron Limited
Shinichiro Araki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing method
Patent number
6,444,409
Issue date
Sep 3, 2002
Tokyo Electron Limited
Shinichiro Araki
G02 - OPTICS
Information
Patent Grant
Coating and developing apparatus
Patent number
6,270,576
Issue date
Aug 7, 2001
Tokyo Electron Limited
Shinichiro Araki
G02 - OPTICS
Information
Patent Grant
Conveying unit and substrate processing unit
Patent number
6,203,617
Issue date
Mar 20, 2001
Tokyo Electron Limited
Shinya Tanoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor treatment system and method for exchanging and treati...
Patent number
5,564,889
Issue date
Oct 15, 1996
Tokyo Electron Limited
Shinichiro Araki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INFORMATION PROCESSING APPARATUS, PROCESSING SYSTEM, PROCESSING MET...
Publication number
20140032151
Publication date
Jan 30, 2014
TOKYO ELECTRON LIMITED
Shinichiro ARAKI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEA...
Publication number
20090076763
Publication date
Mar 19, 2009
TOKYO ELECTRON LIMITED
Kouji Okamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR VERIFYING APPLICABILITY OF NEW OPERATION RECIPE TO SUBST...
Publication number
20080249648
Publication date
Oct 9, 2008
TOKYO ELECTRON LIMITED
Shinichiro Araki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20080212048
Publication date
Sep 4, 2008
TOKYO ELECTRON LIMITED
Shinichiro Araki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Coating and developing method and apparatus therefor
Publication number
20010041311
Publication date
Nov 15, 2001
Shinichiro Araki
G02 - OPTICS