Claims
- 1. A method of forming a plurality of kinds of color resist films on a substrate, said method comprising the steps of:forming one of said plurality of kinds of color resist films on a substrate, the forming step including a step of coating the substrate with a color resist prepared for forming said one of said plurality of kinds of color resist films and a step of developing the color resist coated on the substrate; and repeating the forming step while changing the color resist to be fed onto the substrate, thereby forming said plurality of kinds of color resist films on the substrate, wherein each of the coating steps are carried out by using a common resist-coating unit, which is adapted to apply a plurality kind of color resists each prepared for forming said plurality of kinds of color resist films.
- 2. The method as set forth in claim 1, wherein at least two of the developing steps employ a common developing solution.
- 3. The method as set forth in claim 2, wherein only one kind of developing solution is used in the developing steps.
- 4. The method as set forth in claim 1, wherein the resist-coating unit has a nozzle adapted to feed at least one of said plurality kind of color resists onto the substrate,said method further comprising a step of cleaning an interior space of the nozzle after feeding at least one of said plurality kind of color resists onto the substrate.
- 5. The method as set forth in claim 1, wherein the resist-coating unit has a nozzle adapted to feed all of said plurality kind of color resists onto the substrate,said method further comprising a step of cleaning an interior space of the nozzle during an interval between two of the coating steps, in which the nozzle feeds different kinds of color resists of said plurality kind of color resist onto the substrate, by using only one kind of cleaning fluid capable of dissolving all of said plurality of kinds of color resists.
- 6. The method as set forth in claim 5, wherein the resist-coating unit has a plurality of containers adapted to contain said plurality kinds of color resists,said method further comprising the step of cleaning interior spaces of the container by using the cleaning fluid.
- 7. The method as set forth in claim 1, wherein the substrate is cleaned before each of the coating steps.
- 8. The method as set forth in claim 1, wherein each of said plurality kind of resists is exposed before each of the developing steps.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-233596 |
Aug 1998 |
JP |
|
Parent Case Info
This application is a division of application Ser. No. 09/365,782, filed Aug. 3, 1999, and now U.S. Pat. No. 6,270,576. The disclosure of the prior application is incorporated herein by reference.
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Foreign Referenced Citations (1)
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63-137768 |
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