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Shinji AKAIKE
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Nirasaki-City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Probe apparatus and probe method
Patent number
10,310,010
Issue date
Jun 4, 2019
Tokyo Electron Limited
Muneaki Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Substrate inspection apparatus and control method thereof
Patent number
10,074,192
Issue date
Sep 11, 2018
Tokyo Electron Limited
Kenta Saiki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Position accuracy inspecting method, position accuracy inspecting a...
Patent number
10,006,941
Issue date
Jun 26, 2018
Tokyo Electron Limited
Kenta Saiki
G01 - MEASURING TESTING
Information
Patent Grant
Probe method and apparatus with improved probe contact
Patent number
5,777,485
Issue date
Jul 7, 1998
Tokyo Electron Limited
Hideaki Tanaka
G01 - MEASURING TESTING
Information
Patent Grant
Probe system and probe method
Patent number
5,640,101
Issue date
Jun 17, 1997
Tokyo Electron Limited
Motohiro Kuji
G01 - MEASURING TESTING
Information
Patent Grant
Probe system having vertical height detection and double focal imag...
Patent number
5,585,738
Issue date
Dec 17, 1996
Tokyo Electron Limited
Motohiro Kuji
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
POSITION ACCURACY INSPECTING METHOD, POSITION ACCURACY INSPECTING A...
Publication number
20170219625
Publication date
Aug 3, 2017
TOKYO ELECTRON LIMITED
Kenta Saiki
G01 - MEASURING TESTING
Information
Patent Application
PROBE APPARATUS AND PROBE METHOD
Publication number
20160161553
Publication date
Jun 9, 2016
TOKYO ELECTRON LIMITED
Muneaki TAMURA
G01 - MEASURING TESTING
Information
Patent Application
Substrate Inspection Apparatus and Control Method Thereof
Publication number
20160098837
Publication date
Apr 7, 2016
TOKYO ELECTRON LIMITED
Kenta SAIKI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BONDING DEVICE, BONDING SYSTEM, AND BONDING METHOD
Publication number
20160001543
Publication date
Jan 7, 2016
TOKYO ELECTRON LIMITED
Naoki AKIYAMA
B32 - LAYERED PRODUCTS
Information
Patent Application
BONDING DEVICE AND BONDING METHOD
Publication number
20150017782
Publication date
Jan 15, 2015
TOKYO ELECTRON LIMITED
Naoki AKIYAMA
H01 - BASIC ELECTRIC ELEMENTS