Shinko Matsumoto

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Coating and developing method
- Patent number 6,444,409
- Issue date Sep 3, 2002
- Tokyo Electron Limited
- Shinichiro Araki
- G02 - OPTICS
Information Patent Grant
Coating and developing apparatus
- Patent number 6,270,576
- Issue date Aug 7, 2001
- Tokyo Electron Limited
- Shinichiro Araki
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Coating and developing method and apparatus therefor
- Publication number 20010041311
- Publication date Nov 15, 2001
- Shinichiro Araki
- G02 - OPTICS