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Tosu, JP
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last 30 patents
Information
Patent Grant
Method of forming coating film and apparatus therefor
Patent number
6,063,190
Issue date
May 16, 2000
Tokyo Electron Limited
Keizo Hasebe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Solvent and resist spin coating apparatus
Patent number
5,942,035
Issue date
Aug 24, 1999
Tokyo Electron Limited
Keizo Hasebe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming coating film and apparatus therefor
Patent number
5,658,615
Issue date
Aug 19, 1997
Tokyo Electron Limited
Keizo Hasebe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist processing apparatus, substrate processing apparatus and met...
Patent number
5,626,675
Issue date
May 6, 1997
Tokyo Electron Limited
Yasuhiro Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for scrubbing and cleaning substrate
Patent number
5,518,552
Issue date
May 21, 1996
Tokyo Electron Limited
Kouichi Tanoue
G02 - OPTICS
Information
Patent Grant
Device and method for scrubbing and cleaning substrate
Patent number
5,345,639
Issue date
Sep 13, 1994
Tokyo Electron Limited
Kouichi Tanoue
G02 - OPTICS