Membership
Tour
Register
Log in
Sho Kumakura
Follow
Person
Kurokawa-gun, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,862,441
Issue date
Jan 2, 2024
Tokyo Electron Limited
Hironari Sasagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,728,166
Issue date
Aug 15, 2023
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for selectively etching first region made of silicon nitr...
Patent number
11,637,025
Issue date
Apr 25, 2023
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method
Patent number
11,574,806
Issue date
Feb 7, 2023
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for substrate processing
Patent number
11,488,836
Issue date
Nov 1, 2022
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,459,655
Issue date
Oct 4, 2022
Tokyo Electron Limited
Michiko Nakaya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,450,537
Issue date
Sep 20, 2022
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
11,380,555
Issue date
Jul 5, 2022
Tokyo Electron Limited
Maju Tomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,239,090
Issue date
Feb 1, 2022
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for etching target object
Patent number
11,145,518
Issue date
Oct 12, 2021
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
11,139,169
Issue date
Oct 5, 2021
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
11,114,304
Issue date
Sep 7, 2021
Tokyo Electron Limited
Takayuki Katsunuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
11,094,550
Issue date
Aug 17, 2021
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and plasma processing apparatus
Patent number
10,916,420
Issue date
Feb 9, 2021
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing substrate
Patent number
10,777,425
Issue date
Sep 15, 2020
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
10,755,944
Issue date
Aug 25, 2020
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method
Patent number
10,672,605
Issue date
Jun 2, 2020
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of selectively etching first region made of silicon nitride...
Patent number
10,600,660
Issue date
Mar 24, 2020
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,483,118
Issue date
Nov 19, 2019
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of selectively etching first region made of silicon nitride...
Patent number
10,319,613
Issue date
Jun 11, 2019
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,269,578
Issue date
Apr 23, 2019
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CLEANING CHAMBER OR COMPONENT, SUBSTRATE PROCESSING METH...
Publication number
20240165677
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Yuta NAKANE
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240128092
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuta NAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240120187
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Hironari SASAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240047223
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230282447
Publication date
Sep 7, 2023
TOKYO ELECTRON LIMITED
Takahiro YONEZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR SUBSTRATE PROCESSING
Publication number
20230010069
Publication date
Jan 12, 2023
TOKYO ELECTRON LIMITED
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220411928
Publication date
Dec 29, 2022
TOKYO ELECTRO LIMITED
Michiko NAKAYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS, AND PLASMA P...
Publication number
20220406609
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Takahiro YONEZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220399212
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220384151
Publication date
Dec 1, 2022
TOKYO ELECTRON LIMITED
Yuta NAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20220301881
Publication date
Sep 22, 2022
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220246440
Publication date
Aug 4, 2022
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20220199371
Publication date
Jun 23, 2022
TOKYO ELECTRON LIMITED
Sho KUMAKURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220115241
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Masahiro TABATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING TARGET OBJECT
Publication number
20220005700
Publication date
Jan 6, 2022
TOKYO ELECTRON LIMITED
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210375602
Publication date
Dec 2, 2021
TOKYO ELECTRON LIMITED
Hironari SASAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCE...
Publication number
20210233778
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20210159084
Publication date
May 27, 2021
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20200402800
Publication date
Dec 24, 2020
TOKYO ELECTRON LIMITED
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR SUBSTRATE PROCESSING
Publication number
20200381265
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Masahiro Tabata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200279757
Publication date
Sep 3, 2020
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200279733
Publication date
Sep 3, 2020
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD
Publication number
20200273699
Publication date
Aug 27, 2020
TOKYO ELECTRON LIMITED
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20200234963
Publication date
Jul 23, 2020
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR SELECTIVELY ETCHING FIRST REGION MADE OF SILICON NITR...
Publication number
20200185238
Publication date
Jun 11, 2020
TOKYO ELECTRON LIMITED
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20200176265
Publication date
Jun 4, 2020
TOKYO ELECTRON LIMITED
Takayuki KATSUNUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING TARGET OBJECT
Publication number
20200058512
Publication date
Feb 20, 2020
TOKYO ELECTRON LIMITED
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200032395
Publication date
Jan 30, 2020
TOKYO ELECTRON LIMITED
Michiko NAKAYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200035501
Publication date
Jan 30, 2020
TOKYO ELECTRON LIMITED
Masahiro TABATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20190259626
Publication date
Aug 22, 2019
TOKYO ELECTRON LIMITED
Masahiro TABATA
H01 - BASIC ELECTRIC ELEMENTS