Shogo INABA

Person

Shiojiri, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Structure forming method and device
- Patent number 11,679,976
- Issue date Jun 20, 2023
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, inertia measurement device, vehicle posit...
- Patent number 10,761,109
- Issue date Sep 1, 2020
- Seiko Epson Corporation
- Shogo Inaba
- G01 - MEASURING TESTING
Information Patent Grant
Sensor, electronic apparatus, robot, and mobile object
- Patent number 9,176,013
- Issue date Nov 3, 2015
- Seiko Epson Corporation
- Shogo Inaba
- G01 - MEASURING TESTING
Information Patent Grant
Vibrator, oscillator, electronic apparatus, moving object, and meth...
- Patent number 9,154,109
- Issue date Oct 6, 2015
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Electronic device covered by multiple layers and method for manufac...
- Patent number 8,796,845
- Issue date Aug 5, 2014
- Seiko Epson Corporation
- Yoko Kanemoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS vibrator and oscillator
- Patent number 8,760,234
- Issue date Jun 24, 2014
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional device with functional structure of a microelectromechan...
- Patent number 8,592,925
- Issue date Nov 26, 2013
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and fabrication method thereof
- Patent number 8,552,512
- Issue date Oct 8, 2013
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 8,525,277
- Issue date Sep 3, 2013
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and oscillator
- Patent number 8,432,232
- Issue date Apr 30, 2013
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Electronic device and method for manufacturing thereof
- Patent number 8,410,561
- Issue date Apr 2, 2013
- Seiko Epson Corporation
- Akira Sato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a movable electrode
- Patent number 8,395,227
- Issue date Mar 12, 2013
- Seiko Epson Corporation
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator including a microelectromechanical system structure with...
- Patent number 8,362,577
- Issue date Jan 29, 2013
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS oscillator and method of manufacturing thereof
- Patent number 8,305,152
- Issue date Nov 6, 2012
- Seiko Epson Corporation
- Toru Watanabe
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Micro-electro-mechanical-system (MEMS) resonator and manufacturing...
- Patent number 8,198,957
- Issue date Jun 12, 2012
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Electronic device, resonator, oscillator and method for manufacturi...
- Patent number 8,129,804
- Issue date Mar 6, 2012
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a movable electrode
- Patent number 8,115,266
- Issue date Feb 14, 2012
- Seiko Epson Corporation
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-system (MEMS) resonator and manufacturing...
- Patent number 8,063,721
- Issue date Nov 22, 2011
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacturing MEMS device
- Patent number 8,026,120
- Issue date Sep 27, 2011
- Seiko Epson Corporation
- Ryuji Kihara
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Micro-electro-mechanical-system (MEMS) resonator and manufacturing...
- Patent number 8,018,302
- Issue date Sep 13, 2011
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Electronic device, resonator, oscillator and method for manufacturi...
- Patent number 7,994,594
- Issue date Aug 9, 2011
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a movable electrode
- Patent number 7,989,905
- Issue date Aug 2, 2011
- Seiko Epson Corporation
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switch and manufacturing method thereof
- Patent number 7,956,709
- Issue date Jun 7, 2011
- Seiko Epson Corporation
- Toru Watanabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
MEMS resonator and manufacturing method of the same
- Patent number 7,892,875
- Issue date Feb 22, 2011
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS device having a movable electrode
- Patent number 7,884,431
- Issue date Feb 8, 2011
- Seiko Epson Corporation
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device and method for manufacturing thereof
- Patent number 7,880,245
- Issue date Feb 1, 2011
- Seiko Epson Corporation
- Akira Sato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and fabrication method thereof
- Patent number 7,838,952
- Issue date Nov 23, 2010
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device and method for manufacturing thereof
- Patent number 7,709,912
- Issue date May 4, 2010
- Seiko Epson Corporation
- Akira Sato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a movable electrode
- Patent number 7,696,587
- Issue date Apr 13, 2010
- Seiko Epson Corporation
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator and manufacturing method of the same
- Patent number 7,671,430
- Issue date Mar 2, 2010
- Seiko Epson Corporation
- Shogo Inaba
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE FORMING METHOD AND DEVICE
- Publication number 20200247666
- Publication date Aug 6, 2020
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR, INERTIA MEASUREMENT DEVICE, VEHICLE POSIT...
- Publication number 20190101566
- Publication date Apr 4, 2019
- SEIKO EPSON CORPORATION
- Shogo INABA
- G01 - MEASURING TESTING
Information Patent Application
MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT
- Publication number 20150340968
- Publication date Nov 26, 2015
- SEIKO EPSON CORPORATION
- Shogo INABA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT
- Publication number 20150315011
- Publication date Nov 5, 2015
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD...
- Publication number 20140312734
- Publication date Oct 23, 2014
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND METH...
- Publication number 20140184018
- Publication date Jul 3, 2014
- SEIKO EPSON CORPORATION
- Shogo Inaba
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, A...
- Publication number 20140145551
- Publication date May 29, 2014
- SEIKO EPSON CORPORATION
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR, ELECTRONIC APPARATUS, ROBOT, AND MOBILE OBJECT
- Publication number 20140102217
- Publication date Apr 17, 2014
- SEIKO EPSON CORPORATION
- Shogo Inaba
- G01 - MEASURING TESTING
Information Patent Application
VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, A...
- Publication number 20140103778
- Publication date Apr 17, 2014
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS VIBRATOR AND OSCILLATOR
- Publication number 20130027146
- Publication date Jan 31, 2013
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OSCILLATOR
- Publication number 20120256692
- Publication date Oct 11, 2012
- SEIKO EPSON CORPORATION
- Aritsugu YAJIMA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ELECTRONIC DEVICE, RESONATOR, OSCILLATOR AND METHOD FOR MANUFACTURI...
- Publication number 20120127683
- Publication date May 24, 2012
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
- Publication number 20120104593
- Publication date May 3, 2012
- SEIKO EPSON CORPORATION
- Yoko KANEMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A MOVABLE ELECTRODE
- Publication number 20120104519
- Publication date May 3, 2012
- SEIKO EPSON CORPORATION
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING...
- Publication number 20120025922
- Publication date Feb 2, 2012
- SEIKO EPSON CORPORATION
- Shogo INABA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FUNCTIONAL DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120012950
- Publication date Jan 19, 2012
- SEIKO EPSON CORPORATION
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electronic Device, Resonator, Oscillator and Method for Manufacturi...
- Publication number 20110303457
- Publication date Dec 15, 2011
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20110306153
- Publication date Dec 15, 2011
- SEIKO EPSON CORPORATION
- Ryuji KIHARA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS DEVICE HAVING A MOVABLE ELECTRODE
- Publication number 20110254110
- Publication date Oct 20, 2011
- SEIKO EPSON CORPORATION
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20110241136
- Publication date Oct 6, 2011
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND OSCILLATOR
- Publication number 20110221536
- Publication date Sep 15, 2011
- SEIKO EPSON CORPORATION
- Shogo INABA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS OSCILLATOR AND METHOD OF MANUFACTURING THEREOF
- Publication number 20110148537
- Publication date Jun 23, 2011
- SEIKO EPSON CORPORATION
- Toru WATANABE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Mems Resonator and Manufacturing Method of the Same
- Publication number 20110121908
- Publication date May 26, 2011
- SEIKO EPSON CORPORATION
- Shogo INABA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS DEVICE HAVING A MOVABLE ELECTRODE
- Publication number 20110095383
- Publication date Apr 28, 2011
- SEIKO EPSON CORPORATION
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electronic Device and Method For Manufacturing Thereof
- Publication number 20110089521
- Publication date Apr 21, 2011
- SEIKO EPSON CORPORATION
- Akira SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND FABRICATION METHOD THEREOF
- Publication number 20110031564
- Publication date Feb 10, 2011
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20100178717
- Publication date Jul 15, 2010
- SEIKO EPSON CORPORATION
- Ryuji KIHARA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS DEVICE HAVING A MOVABLE ELECTRODE
- Publication number 20100148284
- Publication date Jun 17, 2010
- SEIKO EPSON CORPORATION
- Toru Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electronic Device and Method for Manufacturing Thereof
- Publication number 20100140734
- Publication date Jun 10, 2010
- SEIKO EPSON CORPORATION
- Akira SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND MANUFACTURING METHOD OF THE SAME
- Publication number 20100109815
- Publication date May 6, 2010
- SEIKO EPSON CORPORATION
- Shogo INABA
- H03 - BASIC ELECTRONIC CIRCUITRY

Shogo INABA

Person

Patents Grantslast 30 patents

Structure forming method and device

Physical quantity sensor, inertia measurement device, vehicle posit...

Sensor, electronic apparatus, robot, and mobile object

Vibrator, oscillator, electronic apparatus, moving object, and meth...

Electronic device covered by multiple layers and method for manufac...

MEMS vibrator and oscillator

Functional device with functional structure of a microelectromechan...

MEMS device and fabrication method thereof

MEMS device

MEMS device and oscillator

Electronic device and method for manufacturing thereof

MEMS device having a movable electrode

Resonator including a microelectromechanical system structure with...

MEMS oscillator and method of manufacturing thereof

Micro-electro-mechanical-system (MEMS) resonator and manufacturing...

Electronic device, resonator, oscillator and method for manufacturi...

MEMS device having a movable electrode

Micro-electro-mechanical-system (MEMS) resonator and manufacturing...

Method of manufacturing MEMS device

Micro-electro-mechanical-system (MEMS) resonator and manufacturing...

Electronic device, resonator, oscillator and method for manufacturi...

MEMS device having a movable electrode

MEMS switch and manufacturing method thereof

MEMS resonator and manufacturing method of the same

MEMS device having a movable electrode

Electronic device and method for manufacturing thereof

MEMS device and fabrication method thereof

Electronic device and method for manufacturing thereof

MEMS device having a movable electrode

MEMS resonator and manufacturing method of the same

Patents Applicationslast 30 patents

STRUCTURE FORMING METHOD AND DEVICE

PHYSICAL QUANTITY SENSOR, INERTIA MEASUREMENT DEVICE, VEHICLE POSIT...

MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT

MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT

VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD...

VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND METH...

VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, A...

SENSOR, ELECTRONIC APPARATUS, ROBOT, AND MOBILE OBJECT

VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, A...

MEMS VIBRATOR AND OSCILLATOR

OSCILLATOR

ELECTRONIC DEVICE, RESONATOR, OSCILLATOR AND METHOD FOR MANUFACTURI...

ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

MEMS DEVICE HAVING A MOVABLE ELECTRODE

MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING...

FUNCTIONAL DEVICE AND MANUFACTURING METHOD THEREOF

Electronic Device, Resonator, Oscillator and Method for Manufacturi...

METHOD OF MANUFACTURING MEMS DEVICE

MEMS DEVICE HAVING A MOVABLE ELECTRODE

MEMS DEVICE

MEMS DEVICE AND OSCILLATOR

MEMS OSCILLATOR AND METHOD OF MANUFACTURING THEREOF

Mems Resonator and Manufacturing Method of the Same

MEMS DEVICE HAVING A MOVABLE ELECTRODE

Electronic Device and Method For Manufacturing Thereof

MEMS DEVICE AND FABRICATION METHOD THEREOF

METHOD OF MANUFACTURING MEMS DEVICE

MEMS DEVICE HAVING A MOVABLE ELECTRODE

Electronic Device and Method for Manufacturing Thereof

MEMS RESONATOR AND MANUFACTURING METHOD OF THE SAME