Shosuke Endo

Person

Kofu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrode, susceptor, plasma processing apparatus and method of mak...
- Patent number 7,337,745
- Issue date Mar 4, 2008
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,544,380
- Issue date Apr 8, 2003
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,391,147
- Issue date May 21, 2002
- Tokyo Electron Limited
- Kosuke Imafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,264,788
- Issue date Jul 24, 2001
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method utilizing an amplitude-modulated high frequ...
- Patent number 6,106,737
- Issue date Aug 22, 2000
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 6,074,518
- Issue date Jun 13, 2000
- Tokyo Electron Limited
- Kosuke Imafuku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber apparatus
- Patent number 6,035,804
- Issue date Mar 14, 2000
- Tokyo Electron Limited
- Junichi Arami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffusion plate for electrode of semiconductor wafer processing...
- Patent number D411516
- Issue date Jun 29, 1999
- Tokyo Electron Limited
- Kosuke Imafuku
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma treatment apparatus and method
- Patent number 5,698,062
- Issue date Dec 16, 1997
- Tokyo Electron Limited
- Takao Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEATING/COOLING DEVICE AND HEATING/COOLING METHOD
- Publication number 20220336238
- Publication date Oct 20, 2022
- Tokyo Electron Limited
- Shosuke ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20020088547
- Publication date Jul 11, 2002
- TOKYO ELECTRON LIMITED
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20010013504
- Publication date Aug 16, 2001
- TOKYO ELECTRON LIMITED
- Kosuke Imafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shosuke Endo

Person

Patents Grantslast 30 patents

Electrode, susceptor, plasma processing apparatus and method of mak...

Plasma treatment method and apparatus

Plasma treatment method and apparatus

Plasma treatment method and apparatus

Plasma treatment method utilizing an amplitude-modulated high frequ...

Plasma processing apparatus

Process chamber apparatus

Gas diffusion plate for electrode of semiconductor wafer processing...

Plasma treatment apparatus and method

Patents Applicationslast 30 patents

HEATING/COOLING DEVICE AND HEATING/COOLING METHOD

Plasma treatment method and apparatus

Plasma treatment method and apparatus