Membership
Tour
Register
Log in
Shota Yoshimura
Follow
Person
Kurokawa-gun, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Processing method and substrate processing apparatus
Patent number
11,380,545
Issue date
Jul 5, 2022
Tokyo Electron Limited
Shota Yoshimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vehicle traveling environment detecting apparatus and vehicle trave...
Patent number
10,984,258
Issue date
Apr 20, 2021
SUBARU CORPORATION
Hikaru Yoshikawa
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Automatic driving system
Patent number
10,933,805
Issue date
Mar 2, 2021
SUBARU CORPORATION
Keisuke Motegi
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Multilayer film etching method and plasma processing apparatus
Patent number
9,373,520
Issue date
Jun 21, 2016
Tokyo Electron Limited
Shota Yoshimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,034,698
Issue date
May 19, 2015
Tokyo Electron Limited
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus, plasma etching method, and semiconductor...
Patent number
8,969,210
Issue date
Mar 3, 2015
Tokyo Electron Limited
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240162045
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240071727
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Takuma SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240071728
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Takanori BANSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230086580
Publication date
Mar 23, 2023
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230005753
Publication date
Jan 5, 2023
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220406613
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, SUBSTRATE PROCESSING S...
Publication number
20220351981
Publication date
Nov 3, 2022
TOKYO ELECTRON LIMITED
Takuma SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210335598
Publication date
Oct 28, 2021
TOKYO ELECTRON LIMITED
Takahiro Tokuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC DRIVING SYSTEM
Publication number
20200254927
Publication date
Aug 13, 2020
SUBARU CORPORATION
Keisuke MOTEGI
B60 - VEHICLES IN GENERAL
Information
Patent Application
PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200144051
Publication date
May 7, 2020
TOKYO ELECTRON LIMITED
Shota YOSHIMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VEHICLE TRAVELING ENVIRONMENT DETECTING APPARATUS AND VEHICLE TRAVE...
Publication number
20200104604
Publication date
Apr 2, 2020
SUBARU CORPORATION
Hikaru YOSHIKAWA
B60 - VEHICLES IN GENERAL
Information
Patent Application
MULTILAYER FILM ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20150140822
Publication date
May 21, 2015
TOKYO ELECTRON LIMITED
Shota YOSHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20150096882
Publication date
Apr 9, 2015
TOKYO ELECTRON LIMITED
Naoki Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150056773
Publication date
Feb 26, 2015
TOKYO ELECTRON LIMITED
Toshihisa Ozu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20120241090
Publication date
Sep 27, 2012
TOKYO ELECTRON LIMITED
Jun Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...
Publication number
20120064726
Publication date
Mar 15, 2012
TOKYO ELECTRON LIMITED
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROLENS ARRAY MANUFACTURING METHOD, AND MICROLENS ARRAY
Publication number
20120026593
Publication date
Feb 2, 2012
Tokyo Electron Limited
Shota Yoshimura
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL