Shouichi Aoshima

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for depositing a thin film, and semiconductor...
- Patent number 6,723,664
- Issue date Apr 20, 2004
- NEC Compound Semiconductor Devices, Ltd.
- Hideki Matsumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a thin film, and semiconductor...
- Patent number 6,349,669
- Issue date Feb 26, 2002
- NEC Corporation
- Hideki Matsumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a thin film
- Patent number 6,069,094
- Issue date May 30, 2000
- Hideki Matsumra
- Hideki Matsumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for depositing a thin film, and semiconductor...
- Publication number 20020086557
- Publication date Jul 4, 2002
- Hideki Matsumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...