ShouQian Shao

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support for chucking of mask for deposition processes
- Patent number 11,967,516
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Jrjyan Jerry Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of tuning to improve plasma stability
- Patent number 11,929,236
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Shouqian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow guide design for uniform flow distribution and efficient p...
- Patent number 10,697,062
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective etching of a multi-layer substrate
- Patent number 9,330,928
- Issue date May 3, 2016
- Intermolecular, Inc.
- Jinhong Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High metal ionization sputter gun
- Patent number 9,175,382
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for combinatorial PECVD or PEALD
- Patent number 9,023,438
- Issue date May 5, 2015
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combinatorial RF bias method for PVD
- Patent number 8,974,649
- Issue date Mar 10, 2015
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for measuring, monitoring and controlling ozone...
- Patent number 8,925,481
- Issue date Jan 6, 2015
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for measuring, monitoring and controlling ozone...
- Patent number 8,851,010
- Issue date Oct 7, 2014
- Intermolecular, Inc.
- ShouQian Shao
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for high-K gate performance improvement and co...
- Patent number 8,821,985
- Issue date Sep 2, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead for processing chamber
- Patent number 8,733,280
- Issue date May 27, 2014
- Intermolecular, Inc.
- Lipyeow Yap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective etching of a multi-layer substrate
- Patent number 8,613,863
- Issue date Dec 24, 2013
- Intermolecular, Inc.
- Jinhong Tong
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH DENSITY PLASMA ENHANCED PROCESS CHAMBER
- Publication number 20230162947
- Publication date May 25, 2023
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ANTENNA UNIT FOR LARGE AREA INDUCTIVELY COUPLED PLASMA PROCES...
- Publication number 20230162948
- Publication date May 25, 2023
- Applied Materials, Inc.
- Shouqian SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF TUNING TO IMPROVE PLASMA STABILITY
- Publication number 20220270858
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Shouqian SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT FOR CHUCKING OF MASK FOR DEPOSITION PROCESSES
- Publication number 20220122876
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jrjyan Jerry CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW GUIDE DESIGN FOR UNIFORM FLOW DISTRIBUTION AND EFFICIENT P...
- Publication number 20200017971
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SOLUTION FOR RESOLVING CGT MURA ISSUE
- Publication number 20190382891
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Shouqian SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for Combinatorial PECVD or PEALD
- Publication number 20150184298
- Publication date Jul 2, 2015
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In Situ Sputtering Target Measurement
- Publication number 20140183036
- Publication date Jul 3, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Piece Target and Magnetron to Prevent Sputtering of Target Ba...
- Publication number 20140174921
- Publication date Jun 26, 2014
- Intermolecular, Inc.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for Combinatorial PECVD or PEALD
- Publication number 20140170335
- Publication date Jun 19, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Control Methods and Hardware Configurations for Ozone Delivery Systems
- Publication number 20140130922
- Publication date May 15, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Combinatorial Site Isolated Plasma Assisted Deposition
- Publication number 20140134849
- Publication date May 15, 2014
- INTERMOLECULAR INC.
- Sandip Niyogi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
New Magnet Design Which Improves Erosion Profile for PVD Systems
- Publication number 20140124359
- Publication date May 8, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for High-K Gate Performance Improvement and Co...
- Publication number 20140127422
- Publication date May 8, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Selective Etching Of A Multi-Layer Substrate
- Publication number 20140077147
- Publication date Mar 20, 2014
- INTERMOLECULAR INC.
- Jinhong Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Enabling And Controlling Ozone Concentration And Flow
- Publication number 20130270103
- Publication date Oct 17, 2013
- INTERMOLECULAR INC.
- ShouQian Shao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method For Sputter Deposition And RF Plasma Sputter Etch Combinator...
- Publication number 20130168231
- Publication date Jul 4, 2013
- INTERMOLECULAR INC.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINATORIAL PROCESSING USING A REMOTE PLASMA SOURCE
- Publication number 20130153536
- Publication date Jun 20, 2013
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINATORIAL RF BIAS METHOD FOR PVD
- Publication number 20130149469
- Publication date Jun 13, 2013
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE ETCHING OF A MULTI-LAYER SUBSTRATE
- Publication number 20130137275
- Publication date May 30, 2013
- Intermolecular, Inc.
- Jinhong Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Metal Ionization Sputter Gun
- Publication number 20130101750
- Publication date Apr 25, 2013
- Intermolecular, Inc.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Measuring, Monitoring and Controlling Ozone...
- Publication number 20130092084
- Publication date Apr 18, 2013
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Measuring, Monitoring and Controlling Ozone...
- Publication number 20130091926
- Publication date Apr 18, 2013
- Intermolecular, Inc.
- ShouQian Shao
- G01 - MEASURING TESTING
Information Patent Application
Showerhead for Processing Chamber
- Publication number 20120156877
- Publication date Jun 21, 2012
- Lipyeow Yap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

ShouQian Shao

Person

Patents Grantslast 30 patents

High density plasma enhanced process chamber

Substrate support for chucking of mask for deposition processes

Methods of tuning to improve plasma stability

Gas flow guide design for uniform flow distribution and efficient p...

Methods for selective etching of a multi-layer substrate

High metal ionization sputter gun

Methods and apparatus for combinatorial PECVD or PEALD

Combinatorial RF bias method for PVD

Systems and methods for measuring, monitoring and controlling ozone...

Systems and methods for measuring, monitoring and controlling ozone...

Method and apparatus for high-K gate performance improvement and co...

Showerhead for processing chamber

Methods for selective etching of a multi-layer substrate

Patents Applicationslast 30 patents

HIGH DENSITY PLASMA ENHANCED PROCESS CHAMBER

MULTI-ANTENNA UNIT FOR LARGE AREA INDUCTIVELY COUPLED PLASMA PROCES...

METHODS OF TUNING TO IMPROVE PLASMA STABILITY

SUBSTRATE SUPPORT FOR CHUCKING OF MASK FOR DEPOSITION PROCESSES

GAS FLOW GUIDE DESIGN FOR UNIFORM FLOW DISTRIBUTION AND EFFICIENT P...

METHOD AND SOLUTION FOR RESOLVING CGT MURA ISSUE

Methods and Apparatus for Combinatorial PECVD or PEALD

In Situ Sputtering Target Measurement

Multi-Piece Target and Magnetron to Prevent Sputtering of Target Ba...

Methods and Apparatus for Combinatorial PECVD or PEALD

Control Methods and Hardware Configurations for Ozone Delivery Systems

Combinatorial Site Isolated Plasma Assisted Deposition

New Magnet Design Which Improves Erosion Profile for PVD Systems

Method and Apparatus for High-K Gate Performance Improvement and Co...

Methods For Selective Etching Of A Multi-Layer Substrate

Method Of Enabling And Controlling Ozone Concentration And Flow

Method For Sputter Deposition And RF Plasma Sputter Etch Combinator...

COMBINATORIAL PROCESSING USING A REMOTE PLASMA SOURCE

COMBINATORIAL RF BIAS METHOD FOR PVD

METHODS FOR SELECTIVE ETCHING OF A MULTI-LAYER SUBSTRATE

High Metal Ionization Sputter Gun

Systems and Methods for Measuring, Monitoring and Controlling Ozone...

Systems and Methods for Measuring, Monitoring and Controlling Ozone...

Showerhead for Processing Chamber