Shu Satoh

Person

Byfield, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for metal contamination control in an ion impl...
- Patent number 11,923,169
- Issue date Mar 5, 2024
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stepped indirectly heated cathode with improved shielding
- Patent number 11,244,800
- Issue date Feb 8, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF resonator for ion beam acceleration
- Patent number 10,342,114
- Issue date Jul 2, 2019
- Axcelis Technologies, Inc.
- Shu Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer clamp detection based on vibration or acoustic characteristic...
- Patent number 10,024,825
- Issue date Jul 17, 2018
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring vertical beam profile in an ion implantation sy...
- Patent number 9,711,328
- Issue date Jul 18, 2017
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implant-induced damage control in ion implantation
- Patent number 9,490,185
- Issue date Nov 8, 2016
- Axcelis Technologies, Inc.
- Ronald N. Reece
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for enhancing beam utilization in a scanned beam ion implanter
- Patent number 9,111,719
- Issue date Aug 18, 2015
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring transverse beam intensity distribution
- Patent number 8,933,424
- Issue date Jan 13, 2015
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Versatile beam glitch detection system
- Patent number 8,227,773
- Issue date Jul 24, 2012
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving implant uniformity during photoresist outgassing
- Patent number 8,080,814
- Issue date Dec 20, 2011
- Axcelis Technologies. Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of performing uniform dose implantation under adv...
- Patent number 8,071,964
- Issue date Dec 6, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for increasing beam current above a maximum energ...
- Patent number 8,035,080
- Issue date Oct 11, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of beam energy identification for single wafer io...
- Patent number 7,973,290
- Issue date Jul 5, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of controlling broad beam uniformity
- Patent number 7,858,955
- Issue date Dec 28, 2010
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extraction electrode manipulator
- Patent number 7,842,931
- Issue date Nov 30, 2010
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad ribbon beam ion implanter architecture with high mass-energy...
- Patent number 7,705,328
- Issue date Apr 27, 2010
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,611,975
- Issue date Nov 3, 2009
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad beam ion implantation architecture
- Patent number 7,528,390
- Issue date May 5, 2009
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,282,427
- Issue date Oct 16, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,253,424
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,235,797
- Issue date Jun 26, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,049,210
- Issue date May 23, 2006
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing a dopant gas species
- Patent number 6,998,626
- Issue date Feb 14, 2006
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 6,908,836
- Issue date Jun 21, 2005
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indirectly heated button cathode for an ion source
- Patent number 6,878,946
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable ion source assembly
- Patent number 6,331,713
- Issue date Dec 18, 2001
- Applied Materials, Inc.
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter
- Patent number 6,207,959
- Issue date Mar 27, 2001
- Applied Materials, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY
- Publication number 20230139138
- Publication date May 4, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM
- Publication number 20210398772
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
- Publication number 20210398765
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPL...
- Publication number 20210249222
- Publication date Aug 12, 2021
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ENHANCING THE ENERGY AND BEAM CURRENT ON RF BASED IMPLANTER
- Publication number 20210057182
- Publication date Feb 25, 2021
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS
- Publication number 20200381209
- Publication date Dec 3, 2020
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF RESONATOR FOR ION BEAM ACCELERATION
- Publication number 20190088443
- Publication date Mar 21, 2019
- Axcelis Technologies, Inc.
- Shu Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Measuring Vertical Beam Profile in an Ion Implantation Sy...
- Publication number 20160189927
- Publication date Jun 30, 2016
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLAMP DETECTION BASED ON VIBRATION OR ACOUSTIC CHARACTERISTIC...
- Publication number 20160187302
- Publication date Jun 30, 2016
- Axcelis Technologies, Inc.
- Shu Satoh
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ENHANCING BEAM UTILIZATION IN A SCANNED BEAM ION IMPLANTER
- Publication number 20150214005
- Publication date Jul 30, 2015
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANT-INDUCED DAMAGE CONTROL IN ION IMPLANTATION
- Publication number 20140065730
- Publication date Mar 6, 2014
- Axcelis Technologies, Inc.
- Ronald N. Reece
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Versatile Beam Glitch Detection System
- Publication number 20120025107
- Publication date Feb 2, 2012
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Improving Implant Uniformity During Photoresist Outgassing
- Publication number 20110215262
- Publication date Sep 8, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR INCREASING BEAM CURRENT ABOVE A MAXIMUM ENERG...
- Publication number 20110101213
- Publication date May 5, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTRACTION ELECTRODE MANIPULATOR
- Publication number 20100072402
- Publication date Mar 25, 2010
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF BEAM ENERGY IDENTIFICATION FOR SINGLE WAFER IO...
- Publication number 20100038553
- Publication date Feb 18, 2010
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF CONTROLLING BROAD BEAM UNIFORMITY
- Publication number 20090321657
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF PERFORMING UNIFORM DOSE IMPLANTATION UNDER ADV...
- Publication number 20090272918
- Publication date Nov 5, 2009
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BROAD RIBBON BEAM ION IMPLANTER ARCHITECTURE WITH HIGH MASS-ENERGY...
- Publication number 20090108198
- Publication date Apr 30, 2009
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Broad beam ion implantation architecture
- Publication number 20080078956
- Publication date Apr 3, 2008
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMIN...
- Publication number 20070259511
- Publication date Nov 8, 2007
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20070105355
- Publication date May 10, 2007
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20060197016
- Publication date Sep 7, 2006
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20050269527
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20040191931
- Publication date Sep 30, 2004
- Applied Materials Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Indirectly heated button cathode for an ion source
- Publication number 20040061068
- Publication date Apr 1, 2004
- APPLIED MATERIALS, INC.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of implanting a substrate and an ion implanter for performin...
- Publication number 20040058513
- Publication date Mar 25, 2004
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Indirectly heated button cathode for an ion source
- Publication number 20030168609
- Publication date Sep 11, 2003
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Apparatus and method for metal contamination control in an ion impl...

Stepped indirectly heated cathode with improved shielding

RF resonator for ion beam acceleration

Wafer clamp detection based on vibration or acoustic characteristic...

Method of measuring vertical beam profile in an ion implantation sy...

Implant-induced damage control in ion implantation

Method for enhancing beam utilization in a scanned beam ion implanter

Method for measuring transverse beam intensity distribution

Versatile beam glitch detection system

Method for improving implant uniformity during photoresist outgassing

System and method of performing uniform dose implantation under adv...

Method and system for increasing beam current above a maximum energ...

System and method of beam energy identification for single wafer io...

System and method of controlling broad beam uniformity

Extraction electrode manipulator

Broad ribbon beam ion implanter architecture with high mass-energy...

Method of implanting a substrate and an ion implanter for performin...

Broad beam ion implantation architecture

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of producing a dopant gas species

Method of implanting a substrate and an ion implanter for performin...

Indirectly heated button cathode for an ion source

Movable ion source assembly

Ion implanter

Patents Applicationslast 30 patents

CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY

TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM

STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING

APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPL...

METHOD OF ENHANCING THE ENERGY AND BEAM CURRENT ON RF BASED IMPLANTER

CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS

RF RESONATOR FOR ION BEAM ACCELERATION

Method of Measuring Vertical Beam Profile in an Ion Implantation Sy...

WAFER CLAMP DETECTION BASED ON VIBRATION OR ACOUSTIC CHARACTERISTIC...

METHOD FOR ENHANCING BEAM UTILIZATION IN A SCANNED BEAM ION IMPLANTER

IMPLANT-INDUCED DAMAGE CONTROL IN ION IMPLANTATION

Versatile Beam Glitch Detection System

Method for Improving Implant Uniformity During Photoresist Outgassing

METHOD AND SYSTEM FOR INCREASING BEAM CURRENT ABOVE A MAXIMUM ENERG...

EXTRACTION ELECTRODE MANIPULATOR

SYSTEM AND METHOD OF BEAM ENERGY IDENTIFICATION FOR SINGLE WAFER IO...

SYSTEM AND METHOD OF CONTROLLING BROAD BEAM UNIFORMITY

SYSTEM AND METHOD OF PERFORMING UNIFORM DOSE IMPLANTATION UNDER ADV...

BROAD RIBBON BEAM ION IMPLANTER ARCHITECTURE WITH HIGH MASS-ENERGY...

Broad beam ion implantation architecture

METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMIN...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Method of implanting a substrate and an ion implanter for performin...

Indirectly heated button cathode for an ion source

Method of implanting a substrate and an ion implanter for performin...

Indirectly heated button cathode for an ion source