Membership
Tour
Register
Log in
Shu-Ting S. Hsu
Follow
Person
Pleasanton, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for etching a deep trench
Publication number
20040097077
Publication date
May 20, 2004
APPLIED MATERIALS, INC.
Padmapani C. Nallan
B81 - MICRO-STRUCTURAL TECHNOLOGY