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Shu Tsai Wang
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Dublin, CA, US
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last 30 patents
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Patent Grant
Gap fill using carbon-based films
Patent number
11,049,716
Issue date
Jun 29, 2021
Lam Research Corporation
Wei Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
GAP FILL USING CARBON-BASED FILMS
Publication number
20190181004
Publication date
Jun 13, 2019
LAM RESEARCH CORPORATION
Wei Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAP FILL USING CARBON-BASED FILMS
Publication number
20160314964
Publication date
Oct 27, 2016
LAM RESEARCH CORPORATION
Wei Tang
H01 - BASIC ELECTRIC ELEMENTS