Shu Tsai Wang

Person

  • Dublin, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Gap fill using carbon-based films

    • Patent number 11,049,716
    • Issue date Jun 29, 2021
    • Lam Research Corporation
    • Wei Tang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    GAP FILL USING CARBON-BASED FILMS

    • Publication number 20190181004
    • Publication date Jun 13, 2019
    • LAM RESEARCH CORPORATION
    • Wei Tang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAP FILL USING CARBON-BASED FILMS

    • Publication number 20160314964
    • Publication date Oct 27, 2016
    • LAM RESEARCH CORPORATION
    • Wei Tang
    • H01 - BASIC ELECTRIC ELEMENTS