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Shuji Azumo

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20240290610
    • Publication date Aug 29, 2024
    • Tokyo Electron Limited
    • Takashi FUSE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING DEVICE
    • Publication number 20240263306
    • Publication date Aug 8, 2024
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
    • Publication number 20240191344
    • Publication date Jun 13, 2024
    • Tokyo Electron Limited
    • Hiroki MURAKAMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION SYSTEM
    • Publication number 20240150895
    • Publication date May 9, 2024
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD
    • Publication number 20240030025
    • Publication date Jan 25, 2024
    • Tokyo Electron Limited
    • Shinichi IKE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION DEVICE
    • Publication number 20230369041
    • Publication date Nov 16, 2023
    • Tokyo Electron Limited
    • Zeyuan NI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SELECTIVE FILM FORMATION METHOD
    • Publication number 20230175115
    • Publication date Jun 8, 2023
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD
    • Publication number 20230148162
    • Publication date May 11, 2023
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20230037372
    • Publication date Feb 9, 2023
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20230009551
    • Publication date Jan 12, 2023
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD
    • Publication number 20220341033
    • Publication date Oct 27, 2022
    • TOKYO ELECTRON LIMITED
    • Shinichi IKE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD
    • Publication number 20220336205
    • Publication date Oct 20, 2022
    • Tokyo Electron Limited
    • Kenji OUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING FILM
    • Publication number 20220189778
    • Publication date Jun 16, 2022
    • Tokyo Electron Limited
    • Shinichi IKE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION DEVICE
    • Publication number 20220186362
    • Publication date Jun 16, 2022
    • Tokyo Electron Limited
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20220189777
    • Publication date Jun 16, 2022
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION DEVICE
    • Publication number 20220181144
    • Publication date Jun 9, 2022
    • TOKYO ELECTRON LIMITED
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR AREA SELECTIVE DEPOSITION USING A SURFACE CLEANING PROCESS
    • Publication number 20210398846
    • Publication date Dec 23, 2021
    • TOKYO ELECTRON LIMITED
    • Kandabara N. Tapily
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20210246547
    • Publication date Aug 12, 2021
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20210087691
    • Publication date Mar 25, 2021
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20200294798
    • Publication date Sep 17, 2020
    • TOKYO ELECTRON LIMITED
    • Yuichiro WAGATSUMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD FOR SiC FILM
    • Publication number 20200063262
    • Publication date Feb 27, 2020
    • TOKYO ELECTRON LIMITED
    • Taiki KATOU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND SYSTEM FOR SELECTIVELY FORMING FILM
    • Publication number 20200006057
    • Publication date Jan 2, 2020
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR APPARATUS
    • Publication number 20190355828
    • Publication date Nov 21, 2019
    • Rohm Co., Ltd.
    • Kenji YAMAMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Selective Film Forming Method and Method of Manufacturing Semicondu...
    • Publication number 20190096750
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Yumiko KAWANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUS
    • Publication number 20180076030
    • Publication date Mar 15, 2018
    • TOKYO ELECTRON LIMITED
    • Kazuki YAMADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
    • Publication number 20150235842
    • Publication date Aug 20, 2015
    • TOKYO ELECTRON LIMITED
    • Kenichi HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20140290857
    • Publication date Oct 2, 2014
    • TOKYO ELECTRON LIMITED
    • Hidenori MIYOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20140094027
    • Publication date Apr 3, 2014
    • OSAKA UNIVERSITY
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND STORAGE MEDIUM
    • Publication number 20120220121
    • Publication date Aug 30, 2012
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING METAL THIN FILM, SEMICONDUCTOR DEVICE AND MANUFA...
    • Publication number 20120211890
    • Publication date Aug 23, 2012
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...