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Shuji Kawamura
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Yokohama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus, producing method of exposure apparatus, and pro...
Patent number
9,280,069
Issue date
Mar 8, 2016
Nikon Corporation
Shuji Kawamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for measuring orthogonality having a third interferometer wh...
Patent number
6,134,007
Issue date
Oct 17, 2000
Nikon Corporation
Tsuyoshi Naraki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for measuring orthogonality in a stage of an exposure apparatus
Patent number
5,995,225
Issue date
Nov 30, 1999
Nikon Corporation
Tsuyoshi Naraki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DE...
Publication number
20100266961
Publication date
Oct 21, 2010
Nikon Corporation
Shuji KAWAMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure Apparatus, Producing Method of Exposure Apparatus, and Pro...
Publication number
20080030702
Publication date
Feb 7, 2008
Nikon Corporation
Shuji Kawamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY