Shuji UOZUMI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of calibrating radiation thermometer and system thereof
- Patent number 12,181,345
- Issue date Dec 31, 2024
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
System for adjusting pad surface temperature and polishing apparatus
- Patent number 11,992,915
- Issue date May 28, 2024
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
Pad-temperature regulating apparatus, pad-temperature regulating me...
- Patent number 11,826,871
- Issue date Nov 28, 2023
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning device
- Patent number 11,517,940
- Issue date Dec 6, 2022
- Ebara Corporation
- Shuji Uozumi
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus for heat exchanger and polishing apparatus
- Patent number 11,383,345
- Issue date Jul 12, 2022
- Ebara Corporation
- Yasuyuki Motoshima
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Device for manufacturing plate solder and method for manufacturing...
- Patent number 11,213,921
- Issue date Jan 4, 2022
- Mitsubishi Electric Corporation
- Shuji Uozumi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20230356267
- Publication date Nov 9, 2023
- EBARA CORPORATION
- Shuji UOZUMI
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20220347814
- Publication date Nov 3, 2022
- EBARA CORPORATION
- BAN ITO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CALIBRATING RADIATION THERMOMETER AND SYSTEM THEREOF
- Publication number 20220228924
- Publication date Jul 21, 2022
- EBARA CORPORATION
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBST...
- Publication number 20220068669
- Publication date Mar 3, 2022
- EBARA CORPORATION
- SHUJI UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PAD-TEMPERATURE REGULATING APPARATUS, PAD-TEMPERATURE REGULATING ME...
- Publication number 20210347004
- Publication date Nov 11, 2021
- EBARA CORPORATION
- Shuji UOZUMI
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM FOR ADJUSTING PAD SURFACE TEMPERATURE AND POLISHING APPARATUS
- Publication number 20210170545
- Publication date Jun 10, 2021
- EBARA CORPORATION
- SHUJI UOZUMI
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING APPARATUS FOR HEAT EXCHANGER AND POLISHING APPARATUS
- Publication number 20200306920
- Publication date Oct 1, 2020
- EBARA CORPORATION
- Yasuyuki Motoshima
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20200276619
- Publication date Sep 3, 2020
- EBARA CORPORATION
- Shuji UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20200188962
- Publication date Jun 18, 2020
- EBARA CORPORATION
- SHUJI UOZUMI
- B08 - CLEANING
Information Patent Application
DEVICE FOR MANUFACTURING PLATE SOLDER AND METHOD FOR MANUFACTURING...
- Publication number 20190389013
- Publication date Dec 26, 2019
- Mitsubishi Electric Corporation
- Shuji UOZUMI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS
- Publication number 20190389030
- Publication date Dec 26, 2019
- EBARA CORPORATION
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF MANUFACTURING PLATE-SHAPED SOLDER AND MANUFACTURING DEVICE
- Publication number 20190193212
- Publication date Jun 27, 2019
- Mitsubishi Electric Corporation
- Shuji UOZUMI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Shuji UOZUMI

Person

Patents Grantslast 30 patents

Method of calibrating radiation thermometer and system thereof

System for adjusting pad surface temperature and polishing apparatus

Pad-temperature regulating apparatus, pad-temperature regulating me...

Substrate cleaning device

Cleaning apparatus for heat exchanger and polishing apparatus

Device for manufacturing plate solder and method for manufacturing...

Patents Applicationslast 30 patents

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

POLISHING APPARATUS AND POLISHING METHOD

METHOD OF CALIBRATING RADIATION THERMOMETER AND SYSTEM THEREOF

SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBST...

PAD-TEMPERATURE REGULATING APPARATUS, PAD-TEMPERATURE REGULATING ME...

SYSTEM FOR ADJUSTING PAD SURFACE TEMPERATURE AND POLISHING APPARATUS

CLEANING APPARATUS FOR HEAT EXCHANGER AND POLISHING APPARATUS

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

SUBSTRATE CLEANING DEVICE

DEVICE FOR MANUFACTURING PLATE SOLDER AND METHOD FOR MANUFACTURING...

METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS

METHOD OF MANUFACTURING PLATE-SHAPED SOLDER AND MANUFACTURING DEVICE