Shunichiro Kojima

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus
- Patent number 7,850,509
- Issue date Dec 14, 2010
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 7,491,117
- Issue date Feb 17, 2009
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing machine
- Patent number 7,156,725
- Issue date Jan 2, 2007
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 7,083,507
- Issue date Aug 1, 2006
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus and polishing apparatus
- Patent number 6,899,604
- Issue date May 31, 2005
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and dressing method for polishing tool
- Patent number 6,899,592
- Issue date May 31, 2005
- Ebara Corporation
- Shunichiro Kojima
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 6,852,019
- Issue date Feb 8, 2005
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing angular substrates
- Patent number 6,790,129
- Issue date Sep 14, 2004
- Shin-Etsu Chemical Co., Ltd.
- Jiro Moriya
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece polishing apparatus comprising a fluid pressure bag provi...
- Patent number 6,435,949
- Issue date Aug 20, 2002
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,409,582
- Issue date Jun 25, 2002
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Polishing device
- Patent number 6,293,858
- Issue date Sep 25, 2001
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,241,592
- Issue date Jun 5, 2001
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,050,884
- Issue date Apr 18, 2000
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 5,934,984
- Issue date Aug 10, 1999
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Substrate holding apparatus
- Publication number 20090061748
- Publication date Mar 5, 2009
- Tetsuji TOGAWA
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20060234609
- Publication date Oct 19, 2006
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20050118935
- Publication date Jun 2, 2005
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing machine
- Publication number 20040209560
- Publication date Oct 21, 2004
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Dressing apparatus and polishing apparatus
- Publication number 20030148707
- Publication date Aug 7, 2003
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Method for polishing angular substrates
- Publication number 20030036340
- Publication date Feb 20, 2003
- Jiro Moriya
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20020042246
- Publication date Apr 11, 2002
- Tetsuji Togawa
- B24 - GRINDING POLISHING

Shunichiro Kojima

Person

Patents Grantslast 30 patents

Substrate holding apparatus

Substrate holding apparatus

Substrate polishing machine

Substrate holding apparatus

Dressing apparatus and polishing apparatus

Polishing apparatus and dressing method for polishing tool

Substrate holding apparatus

Method for polishing angular substrates

Workpiece polishing apparatus comprising a fluid pressure bag provi...

Polishing apparatus

Polishing device

Polishing apparatus

Polishing apparatus

Polishing apparatus

Patents Applicationslast 30 patents

Substrate holding apparatus

Substrate holding apparatus

Substrate holding apparatus

Substrate polishing machine

Dressing apparatus and polishing apparatus

Method for polishing angular substrates

Substrate holding apparatus