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Shunji Hakomori
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer edge polishing system
Patent number
6,840,841
Issue date
Jan 11, 2005
SPEEDFAM Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing periphery of device wafer and polishing method
Patent number
6,773,335
Issue date
Aug 10, 2004
Speedfam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus of and method for polishing the outer circumferential por...
Patent number
6,478,660
Issue date
Nov 12, 2002
Speedfam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for removing deposited film
Patent number
6,422,930
Issue date
Jul 23, 2002
Speedfam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Single-side polishing method for substrate edge, and apparatus ther...
Patent number
6,402,596
Issue date
Jun 11, 2002
SpeedFam-IPEC Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method for silicon wafers which uses a polishing compound...
Patent number
6,290,580
Issue date
Sep 18, 2001
Speedfam-pec Co Ltd
Hiroaki Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for specular-polishing of work edges
Patent number
6,261,160
Issue date
Jul 17, 2001
SpeedFam Co., Ltd.
Shunji Hakomori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for polishing outer periphery of workpiece
Patent number
6,250,995
Issue date
Jun 26, 2001
SpeedFam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier and CMP apparatus
Patent number
6,210,260
Issue date
Apr 3, 2001
SpeedFam Co., Ltd.
Hideo Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Surface polishing apparatus and method of taking out workpiece
Patent number
6,196,906
Issue date
Mar 6, 2001
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for mirror-polishing of workpiece edges
Patent number
6,159,081
Issue date
Dec 12, 2000
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Work-loading method and surface-grinding apparatus with work positi...
Patent number
6,155,908
Issue date
Dec 5, 2000
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Surface grinding machine and carrier used therefor
Patent number
6,139,408
Issue date
Oct 31, 2000
Shunji Hakomori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer processing machine and a processing method thereby
Patent number
6,093,087
Issue date
Jul 25, 2000
SpeedFam Co Ltd
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Single-side abrasion apparatus with dresser
Patent number
5,885,140
Issue date
Mar 23, 1999
Speedfam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Grant
Edge polisher
Patent number
5,094,037
Issue date
Mar 10, 1992
Speedfam Company, Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Wafer edge polishing system
Publication number
20030134570
Publication date
Jul 17, 2003
SPEEDFAM Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for polishing periphery of device wafer and polishing method
Publication number
20020164930
Publication date
Nov 7, 2002
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS OF AND METHOD FOR POLISHING THE OUTER CIRCUMFERENTIAL POR...
Publication number
20020137439
Publication date
Sep 26, 2002
Shunji Hakomori
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for removing deposited film
Publication number
20010034194
Publication date
Oct 25, 2001
SpeedFam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING