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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device fabrication method and pattern formation mold
Patent number
8,282,868
Issue date
Oct 9, 2012
Kabushiki Kaisha Toshiba
Ikuo Yoneda
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for forming pattern and method for manufacturing semiconduct...
Patent number
8,206,895
Issue date
Jun 26, 2012
Kabushiki Kaisha Toshiba
Ikuo Yoneda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron beam drawing apparatus, deflection amplifier, deflection c...
Patent number
7,985,958
Issue date
Jul 26, 2011
Kabushiki Kaisha Toshiba
Tetsuro Nakasugi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Semiconductor device fabrication method and pattern formation mold
Patent number
7,854,604
Issue date
Dec 21, 2010
Kabushiki Kaisha Toshiba
Ikuo Yoneda
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged beam exposure apparatus and method for manufacturing mask a...
Patent number
7,368,736
Issue date
May 6, 2008
Kabushiki Kaisha Toshiba
Shunko Magoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure method and method for producing char...
Patent number
7,102,147
Issue date
Sep 5, 2006
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for producing semiconductor devices
Patent number
7,079,994
Issue date
Jul 18, 2006
Kabushiki Kaisha Toshiba
Ryoichi Inanami
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for correcting a proximity effect, an exposure method, a man...
Patent number
6,835,942
Issue date
Dec 28, 2004
Kabushiki Kaisha Toshiba
Shunko Magoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure system using aperture mask in semico...
Patent number
6,718,532
Issue date
Apr 6, 2004
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for and method of preparing pattern data of electronic part
Patent number
6,675,368
Issue date
Jan 6, 2004
Kabushiki Kaisha Toshiba
Mariko Takayanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Circuit pattern design method, circuit pattern design system, and r...
Patent number
6,560,768
Issue date
May 6, 2003
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of extracting characters and computer-readable recording medium
Patent number
6,543,044
Issue date
Apr 1, 2003
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged beam drawing apparatus
Patent number
6,495,841
Issue date
Dec 17, 2002
Kabushiki Kaisha Toshiba
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Circuit pattern design method, exposure method, charged-particle be...
Patent number
6,481,004
Issue date
Nov 12, 2002
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method
Patent number
6,316,163
Issue date
Nov 13, 2001
Kabushiki Kaisha Toshiba
Shunko Magoshi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam image picturing method and image picturing device
Patent number
6,204,511
Issue date
Mar 20, 2001
Kabushiki Kaisha Toshiba
Masamitsu Itoh
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Pattern-forming method and lithographic system
Patent number
6,093,931
Issue date
Jul 25, 2000
Kabushiki Kaisha Toshiba
Kazuyoshi Sugihara
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Pattern forming method through combined electron beam and light exp...
Patent number
6,020,107
Issue date
Feb 1, 2000
Kabushiki Kaisha Toshiba
Hiromi Niiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern-forming method and lithographic system
Patent number
5,994,030
Issue date
Nov 30, 1999
Kabushiki Kaisha Toshiba
Kazuyoshi Sugihara
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor device fabrication method and pattern formation mold
Publication number
20110065254
Publication date
Mar 17, 2011
Kabushiki Kaisha Toshiba
Ikuo Yoneda
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING PATTERN AND METHOD FOR MANUFACTURING SEMICONDUCT...
Publication number
20100021848
Publication date
Jan 28, 2010
Ikuo Yoneda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY EVALUATING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING M...
Publication number
20080293169
Publication date
Nov 27, 2008
KABUSHI KAISHA TOSHIBA
Kazuo TAWARAYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE FABRICATION METHOD AND PATTERN FORMATION MOLD
Publication number
20080214010
Publication date
Sep 4, 2008
Ikuo YONEDA
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged beam exposure apparatus, charged beam exposure method, meth...
Publication number
20060214116
Publication date
Sep 28, 2006
Shunko Magoshi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam drawing apparatus, deflection amplifier, deflection c...
Publication number
20060151721
Publication date
Jul 13, 2006
Tetsuro Nakasugi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithography evaluating method, semiconductor device manufacturing m...
Publication number
20050167661
Publication date
Aug 4, 2005
Kazuo Tawarayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for correcting a proximity effect, an exposure method, a man...
Publication number
20040075064
Publication date
Apr 22, 2004
Shunko Magoshi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam exposure method and method for producing char...
Publication number
20030160192
Publication date
Aug 28, 2003
Kabushiki Kaisha Toshiba
Ryoichi Inanami
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam exposure system using aperture mask in semico...
Publication number
20020162088
Publication date
Oct 31, 2002
Kabushiki Kaisha Toshiba
Ryoichi Inanami
B82 - NANO-TECHNOLOGY
Information
Patent Application
Apparatus for and method of preparing pattern data of electronic part
Publication number
20020042906
Publication date
Apr 11, 2002
Mariko Takayanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for producing semiconductor devices
Publication number
20020013930
Publication date
Jan 31, 2002
Ryoichi Inanami
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Circuit pattern design method, circuit pattern design system, and r...
Publication number
20020010905
Publication date
Jan 24, 2002
Kabushiki Kaisha Toshiba
Ryoichi Inanami
B82 - NANO-TECHNOLOGY
Information
Patent Application
Circuit pattern design method,exposure method, charged-particle bea...
Publication number
20020010906
Publication date
Jan 24, 2002
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of extracting characters and computer-readable recording medium
Publication number
20010037487
Publication date
Nov 1, 2001
Kabushiki Kaisha Toshiba
Ryoichi Inanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Exposure pattern data generation apparatus associated with standard...
Publication number
20010028991
Publication date
Oct 11, 2001
Kabushiki Kaisha Toshiba
Ryoichi Inanami
B82 - NANO-TECHNOLOGY