Shunzo Imai

Person

Yamato, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus, and device manufacturing method
- Patent number 6,456,364
- Issue date Sep 24, 2002
- Canon Kabushiki Kaisha
- Shunzo Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Power supply apparatus and method, and fabrication apparatus
- Patent number 6,304,005
- Issue date Oct 16, 2001
- Canon Kabushiki Kaisha
- Shuji Aoki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Illumination device including an optical integrator defining a plur...
- Patent number 5,463,497
- Issue date Oct 31, 1995
- Canon Kabushiki Kaisha
- Masato Muraki
- G02 - OPTICS
Information Patent Grant
Illumination device including amplitude-division and beam movements
- Patent number 5,153,773
- Issue date Oct 6, 1992
- Canon Kabushiki Kaisha
- Masato Muraki
- G02 - OPTICS
Information Patent Grant
Wafer handling apparatus and method
- Patent number 4,789,294
- Issue date Dec 6, 1988
- Canon Kabushiki Kaisha
- Mitsuya Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Original feeding apparatus and a cassette for containing the original
- Patent number 4,758,127
- Issue date Jul 19, 1988
- Canon Kabushiki Kaisha
- Shunzo Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer chuck
- Patent number 4,747,608
- Issue date May 31, 1988
- Canon Kabushiki Kaisha
- Mitsuya Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern transfer apparatus
- Patent number 4,630,922
- Issue date Dec 23, 1986
- Canon Kabushiki Kaisha
- Shunzo Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shunzo Imai

Person

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus, and device manufacturing method

Power supply apparatus and method, and fabrication apparatus

Illumination device including an optical integrator defining a plur...

Illumination device including amplitude-division and beam movements

Wafer handling apparatus and method

Original feeding apparatus and a cassette for containing the original

Wafer chuck

Pattern transfer apparatus