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OPTICAL PROXIMITY CORRECTION AND PHOTOMASKS
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Publication number 20230384691
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Co., LTD
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Optical Proximity Correction and Photomasks
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Publication number 20220155692
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Publication date May 19, 2022
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Taiwan Semiconductor Manufacturing Co., LTD
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Optical Proximity Correction and Photomasks
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Publication number 20200301289
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Publication date Sep 24, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Optical Proximity Correction and Photomasks
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Publication number 20190146355
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Publication date May 16, 2019
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PATTERN MODIFICATION AND PATTERNING PROCESS
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Publication number 20180149982
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Publication date May 31, 2018
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shih-Ming CHANG
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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MODEL-BASED RULE TABLE GENERATION
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Publication number 20170053058
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Publication date Feb 23, 2017
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Jue-Chin Yu
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G06 - COMPUTING CALCULATING COUNTING
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