Shuqiang Chen

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Efficient characterization of symmetrically illuminated symmetric 2...
- Patent number 7,525,672
- Issue date Apr 28, 2009
- n&k Technology, Inc.
- Shuqiang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Efficient calculation of grating matrix elements for 2-D diffraction
- Patent number 7,505,147
- Issue date Mar 17, 2009
- n&k Technology, Inc.
- Shuqiang Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and method for efficient characterization of diffracting str...
- Patent number 7,391,524
- Issue date Jun 24, 2008
- n&k Technology, Inc.
- Shuqiang Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and method for measuring overlay alignment using diffraction...
- Patent number 7,289,214
- Issue date Oct 30, 2007
- n & k Technology, Inc.
- Guoguang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift measurement using transmittance spectra
- Patent number 7,253,909
- Issue date Aug 7, 2007
- n & k Technology, Inc.
- Guoguang Li
- G01 - MEASURING TESTING
Information Patent Grant
Optical determination of pattern feature parameters using a scalar...
- Patent number 7,212,293
- Issue date May 1, 2007
- n & k Technology, Inc.
- Guoguang Li
- G01 - MEASURING TESTING